METHOD FOR PRODUCING EXHAUST GAS PURIFICATION CATALYST
AONO FUMINORI, ATSUMI KEN, TAKAHASHI MASAKI, SUGAWARA MOTOI, FUNAKOSHI TOSHIHIRO
Year of Publication 22.03.2018
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Year of Publication 22.03.2018
Patent
A 100-nG/√ Hz-Level Single Au Proof-Mass 3-Axis MEMS Accelerometer with Pillar-Shaped electrodes
Ichikawa, Takashi, Atsumi, Ken, Koga, Tatsuya, Ito, Hiroyuki, Iida, Shin-ichi, Ishihara, Noboru, Yamane, Daisuke, Machida, Katsuyuki, Masu, Kazuya
Published in 2020 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP) (01.06.2020)
Published in 2020 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP) (01.06.2020)
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