Ground state cooling of a quantum electromechanical system with a silicon nitride membrane in a 3D loop-gap cavity
Noguchi, Atsushi, Yamazaki, Rekishu, Ataka, Manabu, Fujita, Hiroyuki, Tabuchi, Yutaka, Ishikawa, Toyofumi, Usami, Koji, Nakamura, Yasunobu
Published in New journal of physics (21.10.2016)
Published in New journal of physics (21.10.2016)
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Journal Article
A Bistable Comb-Drive Electrostatic Actuator Biased by the Built-In Potential of Potassium Ion Electret
Suzuki, Masato, Ashizawa, Hisayuki, Fujita, Yasuhide, Mitsuya, Hiroyuki, Sugiyama, Tatsuhiko, Ataka, Manabu, Toshiyoshi, Hiroshi, Hashiguchi, Gen
Published in Journal of microelectromechanical systems (01.08.2016)
Published in Journal of microelectromechanical systems (01.08.2016)
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Journal Article
Developing a MEMS Device with Built-in Microfluidics for Biophysical Single Cell Characterization
Takayama, Yuki, Perret, Grégoire, Kumemura, Momoko, Ataka, Manabu, Meignan, Samuel, Karsten, Stanislav L, Fujita, Hiroyuki, Collard, Dominique, Lagadec, Chann, Tarhan, Mehmet Cagatay
Published in Micromachines (Basel) (01.06.2018)
Published in Micromachines (Basel) (01.06.2018)
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Journal Article
An Inertia Driven Micro-Actuator for Space Applications
Mita, Makoto, Ataka, Manabu, Fujita, Hiroyuki, Toshiyoshi, Hiroshi
Published in Electronics and communications in Japan (01.03.2014)
Published in Electronics and communications in Japan (01.03.2014)
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Journal Article
Atomic Force Microscope Cantilever Array for Parallel Lithography of Quantum Devices
Kakushima, Kuniyuki, Watanabe, Toshiyuki, Shimamoto, Kouji, Gouda, Takushi, Ataka, Manabu, Mimura, Hidenori, Isono, Yoshimasa, Hashiguchi, Gen, Mihara, Yutaka, Fujita, Hiroyuki
Published in Japanese Journal of Applied Physics (01.06.2004)
Published in Japanese Journal of Applied Physics (01.06.2004)
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Journal Article
Comparison of Superconducting Transition Characteristics of Two Iridium/Gold Bilayer Transition Edge Sensor Devices
Kunieda, Yuichi, Fukuda, Daiji, Ohno, Masashi, Takahashi, Hiroyuki, Nakazawa, Masaharu, Inou, Tadashi, Ataka, Manabu
Published in Japanese Journal of Applied Physics (01.05.2004)
Published in Japanese Journal of Applied Physics (01.05.2004)
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Journal Article
SiO2 Electret Generated by Potassium Ions on a Comb-Drive Actuator
Sugiyama, Tatsuhiko, Aoyama, Mitsuru, Shibata, Yasushi, Suzuki, Masato, Konno, Takashi, Ataka, Manabu, Fujita, Hiroyuki, Hashiguchi, Gen
Published in Applied physics express (01.11.2011)
Published in Applied physics express (01.11.2011)
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Journal Article
Design, Fabrication, and Operation of Two-Dimensional Conveyance System With Ciliary Actuator Arrays
Ataka, M., Legrand, B., Buchaillot, L., Collard, D., Fujita, H.
Published in IEEE/ASME transactions on mechatronics (01.02.2009)
Published in IEEE/ASME transactions on mechatronics (01.02.2009)
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Journal Article
SiO$_{2}$ Electret Generated by Potassium Ions on a Comb-Drive Actuator
Sugiyama, Tatsuhiko, Aoyama, Mitsuru, Shibata, Yasushi, Suzuki, Masato, Konno, Takashi, Ataka, Manabu, Fujita, Hiroyuki, Hashiguchi, Gen
Published in Applied physics express (01.11.2011)
Published in Applied physics express (01.11.2011)
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Journal Article
Highly-Mobile 2D Micro Impact Actuator for Space Applications
Mita, M., Takahashi, K., Ataka, M., Fujita, H., Toshiyoshi, H.
Published in TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference (01.01.2007)
Published in TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference (01.01.2007)
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Conference Proceeding
Fabrication and operation of polyimide bimorph actuators for a ciliary motion system
Ataka, M., Omodaka, A., Takeshima, N., Fujita, H.
Published in Journal of microelectromechanical systems (01.12.1993)
Published in Journal of microelectromechanical systems (01.12.1993)
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Journal Article
A microactuator for head positioning system of hard disk drives
Fujita, H., Suzuki, K., Ataka, M., Nakamura, S.
Published in IEEE transactions on magnetics (01.03.1999)
Published in IEEE transactions on magnetics (01.03.1999)
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Journal Article
Conference Proceeding
Development of Ir/Au-TES Microcalorimeter
Kunieda, Yuichi, Fukuda, Daiji, Ohno, Masashi, Takahashi, Hiroyuki, Ataka, Manabu, Ohkubo, Masataka, Hirayama, Fuminori, Nakazawa, Masaharu
Published in Journal of nuclear science and technology (01.03.2004)
Published in Journal of nuclear science and technology (01.03.2004)
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Journal Article
Strong coupling in multimode quantum electromechanics
Noguchi, Atsushi, Yamazaki, Rekishu, Ataka, Manabu, Fujita, Hiroyuki, Tabuchi, Yutaka, Ishikawa, Toyofumi, Usami, Koji, Nakamura, Yasunobu
Published in arXiv.org (04.02.2016)
Published in arXiv.org (04.02.2016)
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Paper
Journal Article
A new X-ray microcalorimeter based on a pixelated TES array
Fukuda, D., Ohno, M., Takahashi, H., Kunieda, Y., Inou, T., Ohkubo, M., Ataka, M., Nakazawa, M.
Published in IEEE transactions on applied superconductivity (01.06.2003)
Published in IEEE transactions on applied superconductivity (01.06.2003)
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Journal Article
Conference Proceeding
System Configuration and Fabrication Technology for Distributed MEMS
Fujita, H, Ataka, M
Published in 2010 First Workshop on Hardware and Software Implementation and Control of Distributed MEMS (01.06.2010)
Published in 2010 First Workshop on Hardware and Software Implementation and Control of Distributed MEMS (01.06.2010)
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Conference Proceeding
Frequency Transition Phenomenon of Self-Oscillated Micro-Cantilever by Changing Driving Voltage
Mita, Makoto, Ataka, Manabu, Ishida, Tadashi, Fujita, Hiroyuki, Toshiyoshi, Hiroshi
Published in TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference (01.06.2007)
Published in TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference (01.06.2007)
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Conference Proceeding