Exploring the electron density in plasma induced by EUV radiation: I. Experimental study in hydrogen
van der Horst, R M, Beckers, J, Osorio, E A, Astakhov, D I, Goedheer, W J, Lee, C J, Ivanov, V V, Krivtsum, V M, Koshelev, K N, Lopaev, D V, Bijkerk, F, Banine, V Y
Published in Journal of physics. D, Applied physics (10.03.2016)
Published in Journal of physics. D, Applied physics (10.03.2016)
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Exploring the electron density in plasma induced by EUV radiation: II. Numerical studies in argon and hydrogen
Astakhov, D I, Goedheer, W J, Lee, C J, Ivanov, V V, Krivtsun, V M, Koshelev, K N, Lopaev, D V, van der Horst, R M, Beckers, J, Osorio, E A, Bijkerk, F
Published in Journal of physics. D, Applied physics (27.07.2016)
Published in Journal of physics. D, Applied physics (27.07.2016)
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Plasma-based sources of extreme ultraviolet radiation for lithography and mask inspection (50th anniversary of the Institute of Spectroscopy, Russian Academy of Sciences)
Abramenko, D B, Antsiferov, P S, Astakhov, D I, Vinokhodov, A Yu, Vichev, I Yu, Gayazov, R R, Grushin, A S, Dorokhin, L A, Ivanov, V V, Kim, D A, Koshelev, K N, Krainov, P V, Krivokorytov, M S, Krivtsun, V M, Lakatosh, B V, Lash, A A, Medvedev, V V, Ryabtsev, A N, Sidelnikov, Yu V, Snegirev, E P, Solomyannaya, A D, Spiridonov, M V, Tsygvintsev, I P, Yakushev, O F, Yakushkin, A A
Published in Physics Uspekhi (01.03.2019)
Published in Physics Uspekhi (01.03.2019)
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Plasma probe characteristics in low density hydrogen pulsed plasmas
Astakhov, D I, Goedheer, W J, Lee, C J, Ivanov, V V, Krivtsun, V M, Zotovich, A I, Zyryanov, S M, Lopaev, D V, Bijkerk, F
Published in Plasma sources science & technology (01.10.2015)
Published in Plasma sources science & technology (01.10.2015)
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Particle lofting from substrate exposed to plasma and electron beam
Krainov, P V, Ivanov, V V, Astakhov, D I, Medvedev, V V, Kvon, V V, Yakunin, A M, M A van de Kerkhof
Published in arXiv.org (18.11.2020)
Published in arXiv.org (18.11.2020)
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Dielectric particle lofting from dielectric substrate exposed to low energy electron beam
Krainov, P V, Ivanov, V V, Astakhov, D I, M A van de Kerkhof, Kvon, V V, Medvedev, V V, Yakunin, A M
Published in arXiv.org (22.01.2020)
Published in arXiv.org (22.01.2020)
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Journal Article
Exploring the electron density in plasma induced by EUV radiation: II. Numerical studies in argon and hydrogen
Astakhov, D I, Goedheer, W J, Lee, C J, Ivanov, V V, Krivtsun, V M, Koshelev, K N, Lopaev, D V, R M van der Horst, Beckers, J, Osorio, E A, Bijkerk, F
Published in arXiv.org (26.03.2016)
Published in arXiv.org (26.03.2016)
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Numerical and experimental studies of the carbon etching in EUV-induced plasma
Astakhov, D I, Goedheer, W J, Lee, C J, Ivanov, V V, Krivtsun, V M, Yakushev, O, Koshelev, K N, Lopaev, D V, Bijkerk, F
Published in arXiv.org (17.02.2016)
Published in arXiv.org (17.02.2016)
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Journal Article
Plasma probe characteristics in low density hydrogen pulsed plasmas
Astakhov, D I, Goedheer, W J, Lee, C J, Ivanov, V V, Krivtsun, V M, Zotovich, A I, Zyryanov, S M, Lopaev, D V, Bijkerk, F
Published in arXiv.org (09.12.2014)
Published in arXiv.org (09.12.2014)
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