Smart-cut : A new silicon on insulator material technology based on hydrogen implantation and wafer bonding
BRUEL, M, ASPAR, B, AUBERTON-HERVE, A.-J
Published in Japanese journal of applied physics (01.03.1997)
Published in Japanese journal of applied physics (01.03.1997)
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Conference Proceeding
High-frequency surface acoustic waves excited on thin-oriented LiNbO3 single-crystal layers transferred onto silicon
PASTUREAUD, Thomas, SOLAL, Marc, FRIEDT, Jean-Michel, BALLANDRAS, Sylvain, BIASSE, Béatrice, ASPAR, Bernard, BRIOT, Jean-Bernard, DANIAU, William, STEICHEN, William, LARDAT, Raphaël, LAUDE, Vincent, LAËNS, Alain
Published in IEEE transactions on ultrasonics, ferroelectrics, and frequency control (01.04.2007)
Published in IEEE transactions on ultrasonics, ferroelectrics, and frequency control (01.04.2007)
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Journal Article
High-frequency surface acoustic waves excited on thin-oriented LiNbO/sub 3/ single-crystal layers transferred onto silicon
Pastureaud, T., Solal, M., Biasse, B., Aspar, B., Briot, J.-B., Daniau, W., Steichen, W., Lardat, R., Laude, V., Laens, A., Friedt, J.-M., Ballandras, S.
Published in IEEE transactions on ultrasonics, ferroelectrics, and frequency control (01.04.2007)
Published in IEEE transactions on ultrasonics, ferroelectrics, and frequency control (01.04.2007)
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Journal Article
ANNEALING PROCESS FOR ANNEALING A STRUCTURE
BARGE THIERRY, LAGAHE BLANCHARD CHRYSTELLE, ASPAR BERNARD, SOUSBIE NICOLAS
Year of Publication 02.08.2011
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Year of Publication 02.08.2011
Patent