Carrier Density Dependence of Optical Band Gap and Work Function in Sn-Doped In2O3 Films
Sato, Yasushi, Ashida, Toru, Oka, Nobuto, Shigesato, Yuzo
Published in Applied physics express (01.06.2010)
Published in Applied physics express (01.06.2010)
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Journal Article
Reactive Sputter Deposition of SiOxNy Films under Ar--CO2--N2 Atmosphere
Ashida, Toru, Omoto, Hideo, Tomioka, Takao, Takamatsu, Atsushi
Published in Jpn J Appl Phys (01.08.2011)
Published in Jpn J Appl Phys (01.08.2011)
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Journal Article
Internal Stress and Microstructure of Zinc Oxide Films Sputter-Deposited with Carbon Dioxide Gas
Ashida, Toru, Kato, Kazuhiro, Omoto, Hideo, Takamatsu, Atsushi
Published in Japanese Journal of Applied Physics (01.06.2010)
Published in Japanese Journal of Applied Physics (01.06.2010)
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Journal Article