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Published in Japanese Journal of Applied Physics (01.06.2017)
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Resist Residue in Ion Implantation Level Lithography
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Published in Japanese Journal of Applied Physics (01.06.2010)
Published in Japanese Journal of Applied Physics (01.06.2010)
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Characterization of Microbridges Generated on Negative Resist Patterns
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Published in Japanese Journal of Applied Physics (01.03.1999)
Published in Japanese Journal of Applied Physics (01.03.1999)
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Highly Accurate and Precise Measurement Technique for Effective Exposure Dose
Izuha, Kyoko, Fujisawa, Tadahito, Asano, Masafumi, Inoue, Soichi
Published in Japanese Journal of Applied Physics (01.12.2000)
Published in Japanese Journal of Applied Physics (01.12.2000)
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