CHARGED PARTICLE BEAM DEVICE
MURAKI Ayana, SATO Makoto, ASAHATA Tatsuya, TOMIMATSU Satoshi, HIGASHI Yoshinori
Year of Publication 02.08.2024
Get full text
Year of Publication 02.08.2024
Patent
CHARGED PARTICLE BEAM DEVICE AND METHOD FOR CONTROLLING CHARGED PARTICLE BEAM DEVICE
ASAHATA Tatsuya, KIYOHARA Masahiro, TORIKAWA Shota, ISHII Haruyuki, UEMOTO Atsushi
Year of Publication 19.05.2023
Get full text
Year of Publication 19.05.2023
Patent