Search Results - "Arleo, Paul" :: K.UTB vyhledávací portál

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PROCESS CONDITION MEASURING DEVICE (PCMD) AND METHOD FOR MEASURING PROCESS CONDITIONS IN A WORKPIECE PROCESSING TOOL CONFIGURED TO PROCESS PRODUCTION WORKPIECES

by SUN MEI, ARLEO PAUL, JENSEN EARL, VISHAL VAIBHAW, QULI FARHAT
Year of Publication 10.01.2014

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Patent

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Discovering Practical Use of Sensor Wafers in CCP Reactors

by Milenin, Alexey, Demand, Marc, Boullart, Werner, Arleo, Paul
Published in ECS transactions (01.01.2011)

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Journal Article

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PROCESS CONDITION MEASURING DEVICE (PCMD) AND METHOD FOR MEASURING PROCESS CONDITIONS IN A WORKPI ECE PROCESSING TOOL CONFIGURED TO PROCESS PRODUCTION WORKPIECES

by JENSEN, Earl, ARLEO, Paul, QULI, Farhat, VISHAL, Vaibhaw, SUN, Mei
Year of Publication 04.03.2020

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Patent

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Process condition measuring device (PCMD) and method for measuring process conditions in a workpiece processing tool configured to process production workpieces

by SUN MEI, ARLEO PAUL, JENSEN EARL, VISHAL VAIBHAW, QULI FARHAT
Year of Publication 15.09.2015

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Patent

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PROCESS CONDITION MEASURING DEVICE (PCMD) AND METHOD FOR MEASURING PROCESS CONDITIONS IN A WORKPI ECE PROCESSING TOOL CONFIGURED TO PROCESS PRODUCTION WORKPIECES

by ARLEO, PAUL, QULI, FARHAT, VISHAL, VAIBHAW, SUN, MEI, JENSEN, EARL
Year of Publication 19.11.2014

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Patent

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OXIDE ETCH PROCESS USING A MIXTURE OF A FLUORINE-SUBSTITUTED HYDROCARBON AND ACETYLENE THAT PROVIDES HIGH SELECTIVITY TO NITRIDE

by ARLEO, PAUL
Year of Publication 22.04.1999

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Patent

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Oxide etch process using a mixture of a fluorine-substituted hydrocarbon and acetylene that provides high selectivity to nitride and is suitable for use on surfaces of uneven topography

by ARLEO; PAUL
Year of Publication 09.03.1999

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Patent

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PROCESS CONDITION MEASURING DEVICE (PCMD) AND METHOD FOR MEASURING PROCESS CONDITIONS IN A WORKPI ECE PROCESSING TOOL CONFIGURED TO PROCESS PRODUCTION WORKPIECES

by ARLEO, PAUL, QULI, FARHAT, VISHAL, VAIBHAW, SUN, MEI, JENSEN, EARL
Year of Publication 11.12.2013

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Patent

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PROCESS CONDITION MEASURING DEVICE (PCMD) AND METHOD FOR MEASURING PROCESS CONDITIONS IN A WORKPI ECE PROCESSING TOOL CONFIGURED TO PROCESS PRODUCTION WORKPIECES

by ARLEO, PAUL, QULI, FARHAT, VISHAL, VAIBHAW, SUN, MEI, JENSEN, EARL
Year of Publication 08.11.2012

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Patent

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PROCESS CONDITION MEASURING DEVICE (PCMD) AND METHOD FOR MEASURING PROCESS CONDITIONS IN A WORKPI ECE PROCESSING TOOL CONFIGURED TO PROCESS PRODUCTION WORKPIECES

by ARLEO, PAUL, QULI, FARHAT, VISHAL, VAIBHAW, SUN, MEI, JENSEN, EARL
Year of Publication 09.08.2012

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Patent

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PROCESS CONDITION MEASURING DEVICE (PCMD) AND METHOD FOR MEASURING PROCESS CONDITIONS IN A WORKPIECE PROCESSING TOOL CONFIGURED TO PROCESS PRODUCTION WORKPIECES

by SUN MEI, ARLEO PAUL, JENSEN EARL, VISHAL VAIBHAW, QULI FARHAT
Year of Publication 09.08.2012

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Patent

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Process condition measuring device (pcmd) and method for measuring process conditions in a workpiece processing tool configured to process production workpieces

by ARLEO, PAUL, QULI, FARHAT, VISHAL, VAIBHAW, SUN, MEI, JENSEN, EARL
Year of Publication 21.01.2015

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Patent

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Process condition measuring device (PCMD) and method for measuring process conditions in a workpiece processing tool configured to process production workpieces

by SUN MEI, ARLEO PAUL, JENSEN EARL, VISHAL VAIBHAW, QULI FARHAT
Year of Publication 18.12.2013

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Patent

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Process condition measuring device (PCMD) and method for measuring process conditions in a workpiece processing tool configured to process production workpieces

by ARLEO, PAUL, QULI, FARHAT, VISHAL, VAIBHAW, SUN, MEI, JENSEN, EARL
Year of Publication 01.10.2012

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Patent

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ELECTROSTATIC OR MECHANICAL CHUCK ASSEMBLY CONFERRING IMPROVED TEMPERATURE UNIFORMITY ONTO WORKPIECES HELD THEREBY, WORKPIECE PROCESSING TECHNOLOGY AND/OR APPARATUS CONTAINING THE SAME, AND METHOD(S) FOR HOLDING AND/OR PROCESSING A WORKPIECE WITH THE SAME

by Qiao, Jianmin, Nulty, James E, Arleo, Paul, Salimian, Siamak
Year of Publication 16.04.2002

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Patent

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ELECTROSTATIC OR MECHANICAL CHUCK ASSEMBLY CONFERRING IMPROVED TEMPERATURE UNIFORMITY ONTO WORKPIECES HELD THEREBY, WORKPIECE PROCESSING TECHNOLOGY AND/OR APPARATUS CONTAINING THE SAME, AND METHOD(S) FOR HOLDING AND/OR PROCESSING A WORKPIECE WITH THE SAME

by QIAO JIANMIN, NULTY JAMES E, ARLEO PAUL, SALIMIAN SIAMAK
Year of Publication 16.04.2002

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Patent

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Oxide etch process with high selectivity to nitride suitable for use on surfaces of uneven topography

by YANG CHAN-LON, CHANG MEI, LI HAOJIANG, ARLEO PAUL, LEVINSTEIN HYMAN
Year of Publication 06.02.2001

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Patent

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LETTERS: QUEENS Edition 1

by Michael Burke, Paul Arleo, A. Morton Rosenfield, Christa J. Fanelli
Published in Newsday (25.07.2003)

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Newspaper Article

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Oxide etch process with high selectivity to nitride suitable for use on surfaces of uneven topography

by LEVINSTEIN, HYMAN, ARLEO, PAUL, LI, HAOJIANG, CHANG, MEI, YANG, CHAN-LON
Year of Publication 04.06.1997

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Patent

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Process for forming a via in an integrated circuit structure by etching through an insulation layer while inhibiting sputtering of underlying metal

by HILLS; GRAHAM, WU; ROBERT, ARLEO; PAUL, WONG; JERRY, HENRI; JON
Year of Publication 05.01.1993

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Patent

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