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Year of Publication 05.10.2020
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Year of Publication 11.03.2019
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Year of Publication 11.01.2024
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Year of Publication 10.01.2024
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Method and Apparatus for Forming a Patterned Layer of Carbon, Method of Forming a Patterned Layer of Material
ANTONOV, Pavlo, TEN KATE, Nicolaas, LUGIER, Olivier Christian Maurice, FRENKEN, Joost Wilhelmus Maria, VERHOEVEN, Jan, CASTELLANOS ORTEGA, Sonia
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Year of Publication 04.02.2021
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METHOD AND APPARATUS FOR FORMING A PATTERNED LAYER OF CARBON
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Year of Publication 04.09.2019
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Year of Publication 21.07.2020
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A SUBSTRATE HOLDER AND A METHOD OF MANUFACTURING A SUBSTRATE HOLDER
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Year of Publication 31.10.2019
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A SUBSTRATE HOLDER AND A METHOD OF MANUFACTURING A SUBSTRATE HOLDER
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Year of Publication 15.05.2019
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Year of Publication 25.02.2021
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A SUBSTRATE HOLDER AND A METHOD OF MANUFACTURING A SUBSTRATE HOLDER
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Year of Publication 22.09.2020
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