Microelectricalmechanical system with improved beam suspension
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Year of Publication 23.05.2006
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Microelectricalmechanical system with improved beam suspension
Herbert, Patrick C, Annis, Jeffrey R, Yao, Jun J, Morris, Winfred L, Larsson, Henric, Harris, Richard D, Kretschmann, Robert J
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Year of Publication 23.05.2006
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Microelectrical mechanical system with improved beam suspension
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Year of Publication 24.04.2003
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Microelectricalmechanical system with improved beam suspension
HERBERT PATRICK C, MORRIS WINFRED L, LARSSON HENRIC, ANNIS JEFFREY R, YAO JUN J, HARRIS RICHARD D, KRETSCHMANN ROBERT J
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Microelectromechanical system (MEMS) with improved beam suspension
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Year of Publication 12.10.2004
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Microelectromechanical system (MEMS) with improved beam suspension
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Year of Publication 13.08.2002
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Microelectromechanical system with improved beam suspension
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