Fabrication and electrochemical characterization of ruthenium nanoelectrodes
Allani, Sonja, Jupe, Andreas, Figge, Martin, Goehlich, Andreas, Vogt, Holger
Published in Current directions in biomedical engineering (01.09.2017)
Published in Current directions in biomedical engineering (01.09.2017)
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Journal Article
Analytical model for thin-film SOI PIN-diode leakage current
Schmidt, Andrei, Dreiner, Stefan, Vogt, Holger, Goehlich, Andreas, Paschen, Uwe
Published in Solid-state electronics (01.04.2017)
Published in Solid-state electronics (01.04.2017)
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Journal Article
Poster session 10: Medical measuring techniques I
Livshits, Pavel, Jupe, Andreas, Kahnert, Stefan, Figge, Martin, Mross, Stefan, Goertz, Michael, Vogt, Holger, Goehlich, Andreas
Published in Biomedizinische Technik (28.08.2017)
Published in Biomedizinische Technik (28.08.2017)
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Journal Article
PECVD of poly-SiGe/Ge layers with increased total gas flow
Wang, Qiang, Göhlich, Andreas, Ruß, Marco, Yang, Pin, Vogt, Holger
Published in Microelectronic engineering (01.03.2014)
Published in Microelectronic engineering (01.03.2014)
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Journal Article
Mikrofluidik-Chip-Architekturen für eine Zell-Sortieranlage basierend auf der Elektrowetting-Technologie
Schreiber, Fedor, Kahnert, Stefan, Goehlich, Andreas, Greifendorf, Dieter, Bartels, Frank, Janzyk, Udo, Lennartz, Klaus, Kirstein, Uwe, Rennings, Andreas, Küppers, Ralf, Erni, Daniel
Published in Technisches Messen (28.05.2016)
Published in Technisches Messen (28.05.2016)
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Journal Article
Encapsulation of implantable integrated MEMS pressure sensors using polyimide epoxy composite and atomic layer deposition
Gembaczka, P, Görtz, M, Celik, Y, Jupe, A, Stühlmeyer, M, Goehlich, A, Vogt, H, Mokwa, W, Kraft, M
Published in Journal of sensors and sensor systems (19.12.2014)
Published in Journal of sensors and sensor systems (19.12.2014)
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Journal Article
Web Resource
Tapering of nanoelectrodes for an intracellular contact via a double hard mask technique
Allani, Sonja, Jupe, Andreas, Figge, Martin, Goehlich, Andreas, Vogt, Holger
Published in 2017 13th Conference on Ph.D. Research in Microelectronics and Electronics (PRIME) (01.06.2017)
Published in 2017 13th Conference on Ph.D. Research in Microelectronics and Electronics (PRIME) (01.06.2017)
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Conference Proceeding
Analysis of Semiconductor Process Variations by Means of Hierarchical Median Polish
Willsch, Benjamin, Hauser, Julia, Dreiner, Stefan, Goehlich, Andreas, Kappert, Holger, Vogt, Holger
Published in 2017 Austrochip Workshop on Microelectronics (Austrochip) (01.10.2017)
Published in 2017 Austrochip Workshop on Microelectronics (Austrochip) (01.10.2017)
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Conference Proceeding
Statistical tests to determine spatial correlations in the response behavior of PUF
Willsch, Benjamin, Hauser, Julia, Dreiner, Stefan, Goehlich, Andreas, Vogt, Holger
Published in 2016 12th Conference on Ph.D. Research in Microelectronics and Electronics (PRIME) (01.06.2016)
Published in 2016 12th Conference on Ph.D. Research in Microelectronics and Electronics (PRIME) (01.06.2016)
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Conference Proceeding
ALD-based 3D-capacitors for harsh environments
Dietz, Dorothee, Celik, Yusuf, Goehlich, Andreas, Vogt, Holger
Published in 2016 12th Conference on Ph.D. Research in Microelectronics and Electronics (PRIME) (01.06.2016)
Published in 2016 12th Conference on Ph.D. Research in Microelectronics and Electronics (PRIME) (01.06.2016)
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Conference Proceeding
Diagnostics of atoms by laser spectroscopic methods in plasmas and plasma-wall interaction studies (vacuum ultraviolet and two-photon techniques)
Döbele, H F, Czarnetzki, U, Goehlich, Andreas
Published in Plasma sources science & technology (01.11.2000)
Published in Plasma sources science & technology (01.11.2000)
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Journal Article
Conference Proceeding
Determination of time-of-flight distributions of sputtered oxygen and carbon atoms by resonant multi-photon ionization
Goehlich, Andreas, Goehlich, Alexandra, Döbele, H.F
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.04.2000)
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.04.2000)
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Journal Article