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Published in Theory and Applications of Models of Computation (01.01.2019)
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Book Chapter
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Year of Publication 09.09.2003
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Wafer cleaning device and tray for use in wafer cleaning device
Sonoda, Haruki, Nishizaki, Kazuto, Oishi, Tetsuji, Hirokawa, Masatoshi, Ando, Ei-Ichi, Abe, Yusuke, Omori, Masashi
Year of Publication 06.06.2002
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Year of Publication 06.06.2002
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Wafer cleaning device and tray for use in wafer cleaning device
NISHIZAKI KAZUTO, SONODA HARUKI, ANDO EI-ICHI, ABE YUSUKE, OISHI TETSUJI, HIROKAWA MASATOSHI, OMORI MASASHI
Year of Publication 09.09.2003
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Year of Publication 09.09.2003
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Sonoda, Haruki, Nobata, Hirotaka, Tatehaba, Yoshihito, Ohtsubo, Tetsurou, Morito, Yasuomi, Shimada, Kiyoshi, Abe, Yusuke, Ando, Ei?apos;Ichi, Oishi, Tetsuji
Year of Publication 20.03.2003
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Year of Publication 20.03.2003
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Wafer cleaning device and tray for use in wafer cleaning device
NISHIZAKI KAZUTO, SONODA HARUKI, ANDO EI-ICHI, ABE YUSUKE, OISHI TETSUJI, HIROKAWA MASATOSHI, OMORI MASASHI
Year of Publication 06.06.2002
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Year of Publication 06.06.2002
Patent
WAFER CLEANING DEVICE AND TRAY FOR USE IN WAFER CLEANING DEVICE
NISHIZAKI KAZUTO, SONODA HARUKI, ANDO EI-ICHI, ABE YUSUKE, OISHI TETSUJI, HIROKAWA MASATOSHI, OMORI MASASHI
Year of Publication 06.12.2001
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Year of Publication 06.12.2001
Patent
WAFER CLEANING DEVICE AND TRAY FOR USE IN WAFER CLEANING DEVICE
SONODA, HARUKI, NISHIZAKI, KAZUTO, OISHI, TETSUJI, HIROKAWA, MASATOSHI, ANDO, EI-ICHI, ABE, YUSUKE, OMORI, MASASHI
Year of Publication 06.12.2001
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Year of Publication 06.12.2001
Patent