Acceleration complex for extreme ultraviolet nanolithography based on a free-electron laser with kilowatt-scale average radiation power
Syresin, E. M., Anchutkin, V. S., Budagov, Yu. A., Bel’skii, A. B., Gushchin, O. P., Lenskii, I. F., Ol’shevskii, A. G., Sisakyan, A. N., Trubnikov, G. V., Shelepin, N. A., Shirkov, G. D., Yurkov, M. V.
Published in Surface investigation, x-ray, synchrotron and neutron techniques (01.06.2011)
Published in Surface investigation, x-ray, synchrotron and neutron techniques (01.06.2011)
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