Research and Development of the Deep Plasma-Chemical Silicon Etching Process for the Creation of a Silicon Element with a Vertical Profile
Kalugin, Victor V., Kochurina, Elena S., Zariankin, M. N., Anchutin, A. S., Phyo, Nyan Linn
Published in 2020 IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering (EIConRus) (01.01.2020)
Published in 2020 IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering (EIConRus) (01.01.2020)
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Conference Proceeding
Micromechanical Gyroscope Design Basis
Timoshenkov, S.P., Morozova, E.S., Anchutin, S.A., Plehanov, V.E., Zotov, S.A., Kalugin, V.V.
Published in 2007 17th International Crimean Conference - Microwave & Telecommunication Technology (01.09.2007)
Published in 2007 17th International Crimean Conference - Microwave & Telecommunication Technology (01.09.2007)
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Conference Proceeding