High-quality GaAs/AlAs buried heterostructures grown by molecular beam epitaxy on patterned substrates
SAITO, H, SUGIMOTO, M, ANAN, M, OCHIAI, Y
Published in Japanese Journal of Applied Physics (01.08.1993)
Published in Japanese Journal of Applied Physics (01.08.1993)
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Journal Article
Chlorine-Based Smooth Reactive Ion Beam Etching of Indium-Containing III-V Compound Semiconductor
Yoshikawa, Takashi, Kohmoto, Sigeru, Anan, Masami, Hamao, Noboru, Baba, Masakazu, Takado, Norikazu, Sugimoto, Yoshimasa, Sugimoto, Mitsunori, Asakawa, Kiyoshi
Published in Japanese Journal of Applied Physics (01.12.1992)
Published in Japanese Journal of Applied Physics (01.12.1992)
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Journal Article