Surface composition analysis of HF vapour cleaned silicon by X-ray photoelectron spectroscopy
Ermolieff, A., Martin, F., Amouroux, A., Marthon, S., Westendorp, J.F.M.
Published in Applied surface science (1991)
Published in Applied surface science (1991)
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Journal Article
Conference Proceeding
Surface composition analysis of HF-vapour-cleaned silicon by X-ray photoelectron spectroscopy
Ermolieff, A, Martin, F, Amouroux, A, Marthon, S, Westendorp, J F M
Published in Semiconductor science and technology (01.02.1991)
Published in Semiconductor science and technology (01.02.1991)
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Journal Article
XPS studies of contamination of reactor and silicon surfaces caused by reactive ion etching
Ermolieff, A, Amouroux, A, Marthon, S, Faviet, J F, Peccoud, L
Published in Semiconductor science and technology (01.04.1991)
Published in Semiconductor science and technology (01.04.1991)
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Journal Article
MOSFET transistor
DELALLEAU JULIEN, MONFRAY STEPHANE, JULIEN FRANCK, DURA JUAN, AMOUROUX JULIEN
Year of Publication 23.02.2024
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Year of Publication 23.02.2024
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