Effect of N2/H2 plasma on GaN substrate cleaning for homoepitaxial GaN growth by radical-enhanced metalorganic chemical vapor deposition (REMOCVD)
Amalraj, Frank Wilson, Dhasiyan, Arun Kumar, Lu, Yi, Shimizu, Naohiro, Oda, Osamu, Ishikawa, Kenji, Kondo, Hiroki, Sekine, Makoto, Ikarashi, Nobuyuki, Hori, Masaru
Published in AIP advances (01.11.2018)
Published in AIP advances (01.11.2018)
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Journal Article
Gas-phase study of the behavior of trimethyl gallium and triethyl gallium by optical emission spectroscopy and quadrupole mass spectroscopy for the growth of GaN by REMOCVD (radical-enhanced metalorganic chemical vapor deposition)
Dhasiyan, Arun Kumar, Jayaprasad, Swathy, Amalraj, Frank Wilson, Shimizu, Naohiro, Oda, Osamu, Ishikawa, Kenji, Hori, Masaru
Published in Japanese Journal of Applied Physics (01.11.2023)
Published in Japanese Journal of Applied Physics (01.11.2023)
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Journal Article
Epitaxial growth of high-quality GaN with a high growth rate at low temperatures by radical-enhanced metalorganic chemical vapor deposition
Dhasiyan, Arun Kumar, Amalraj, Frank Wilson, Jayaprasad, Swathy, Shimizu, Naohiro, Oda, Osamu, Ishikawa, Kenji, Hori, Masaru
Published in Scientific reports (13.05.2024)
Published in Scientific reports (13.05.2024)
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Journal Article
Effect of N 2 /H 2 plasma on GaN substrate cleaning for homoepitaxial GaN growth by radical-enhanced metalorganic chemical vapor deposition (REMOCVD)
Amalraj, Frank Wilson, Dhasiyan, Arun Kumar, Lu, Yi, Shimizu, Naohiro, Oda, Osamu, Ishikawa, Kenji, Kondo, Hiroki, Sekine, Makoto, Ikarashi, Nobuyuki, Hori, Masaru
Published in AIP advances (01.11.2018)
Published in AIP advances (01.11.2018)
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Journal Article
Evaluation of Electron Trapping Speed of AlGaN/ GaN HEMT With Real-Time Electroluminescence and Pulsed I―V Measurements : GaN ELECTRONIC DEVICES
WAKEJIMA, Akio, WILSON, Amalraj Frank, MASE, Suguru, JOKA, Takuya, EGAWA, Takashi
Published in IEEE transactions on electron devices (2013)
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Published in IEEE transactions on electron devices (2013)
Journal Article