Single Ion Implantation into Si-Based Devices
Johnson, Brett C., Tettamanzi, Giuseppe, Yang, Changyi, Alves, Andew, Van Donkelaar, Jessica, Thompson, Samuel, Verduijn, Arjan, Mol, Jan A., Wacquez, Romain, Vinet, Maud, Dzurak, Andrew, Sanquer, M., Rogge, Sven, Jamieson, David
Published in ECS transactions (01.10.2010)
Published in ECS transactions (01.10.2010)
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Journal Article
Single Dopant Implantation into a Nanoscale MOSFET Devices
Johnson, Brett C., Alves, Andew, Van Donkelaar, Jessica, Thompson, Samuel, Yang, Changyi, Jamieson, David, Verduijn, Arjan, Mol, Jan, Tettamanzi, Giuseppe, Rogge, Sven, Wacquez, Romain, Vinet, Maud, Dzurak, Andrew
Published in Meeting abstracts (Electrochemical Society) (08.07.2010)
Published in Meeting abstracts (Electrochemical Society) (08.07.2010)
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Journal Article