Advanced optical modeling of thin metals for improved robustness and accuracy of scatterometric models
Hartig, Carsten, Urbanowicz, Adam M., Likhachev, Dmitriy, Altendorf, Ines, Reichel, Andreas, Weisheit, Martin
Published in 2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2019)
Published in 2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2019)
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Conference Proceeding
From Emergence to Prevalence: 22FDX® Embedded STT-MRAM
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Published in 2022 IEEE International Memory Workshop (IMW) (01.05.2022)
Published in 2022 IEEE International Memory Workshop (IMW) (01.05.2022)
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Conference Proceeding