FinFET with reduced parasitic capacitance
Alptekin, Emre, Basker, Veeraraghavan S, Kanakasabapathy, Sivananda K
Year of Publication 01.01.2019
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Year of Publication 01.01.2019
Patent
THERMALLY STABLE SALICIDE FORMATION FOR SALICIDE FIRST CONTACTS
Alptekin, Emre, Lavoie, Christian, Adusumilli, Praneet, Ozcan, Ahmet S
Year of Publication 25.10.2018
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Year of Publication 25.10.2018
Patent
THERMALLY STABLE SALICIDE FORMATION FOR SALICIDE FIRST CONTACTS
Alptekin, Emre, Lavoie, Christian, Adusumilli, Praneet, Ozcan, Ahmet S
Year of Publication 25.10.2018
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Year of Publication 25.10.2018
Patent
Partial spacer for increasing self aligned contact process margins
Vega, Reinaldo A, Alptekin, Emre, Ramachandran, Ravikumar, Sardesai, Viraj Y
Year of Publication 25.09.2018
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Year of Publication 25.09.2018
Patent
Contacts to semiconductor substrate and methods of forming same
Alptekin, Emre, Lavoie, Christian, Breil, Nicolas L, Ozcan, Ahmet S, Schonenberg, Kathryn T
Year of Publication 07.07.2020
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Year of Publication 07.07.2020
Patent
Reliable gate contacts over active areas
Eastman, Eric, Chu, Albert M, Alptekin, Emre, Na, Myung-Hee, Ramachandran, Ravikumar
Year of Publication 23.06.2020
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Year of Publication 23.06.2020
Patent
(Invited) Contacts in Advanced CMOS: History and Emerging Challenges
Lavoie, Christian, Adusumilli, Praneet, Carr, Adra V, Jordan Sweet, Jean S., Ozcan, Ahmet S, Levrau, Elisabeth, Breil, Nicolas, Alptekin, Emre
Published in Meeting abstracts (Electrochemical Society) (15.04.2017)
Published in Meeting abstracts (Electrochemical Society) (15.04.2017)
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Journal Article
FINFET WITH REDUCED PARASITIC CAPACITANCE
Alptekin, Emre, Basker, Veeraraghavan S, Kanakasabapathy, Sivananda K
Year of Publication 31.05.2018
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Year of Publication 31.05.2018
Patent
FinFET with reduced parasitic capacitance
Alptekin, Emre, Basker, Veeraraghavan S, Kanakasabapathy, Sivananda K
Year of Publication 29.05.2018
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Year of Publication 29.05.2018
Patent
FINFET WITH REDUCED PARASITIC CAPACITENCE
Alptekin, Emre, Basker, Veeraraghavan S, Kanakasabapathy, Sivananda K
Year of Publication 26.04.2018
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Year of Publication 26.04.2018
Patent
FINFET WITH REDUCED PARASITIC CAPACITANCE
Alptekin, Emre, Basker, Veeraraghavan S, Kanakasabapathy, Sivananda K
Year of Publication 26.04.2018
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Year of Publication 26.04.2018
Patent
Partial spacer for increasing self aligned contact process margins
Vega Reinaldo A, Alptekin Emre, Ramachandran Ravikumar, Sardesai Viraj Y
Year of Publication 27.03.2018
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Year of Publication 27.03.2018
Patent
PARTIAL SPACER FOR INCREASING SELF ALIGNED CONTACT PROCESS MARGINS
Vega Reinaldo A, Alptekin Emre, Ramachandran Ravikumar, Sardesai Viraj Y
Year of Publication 08.03.2018
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Year of Publication 08.03.2018
Patent