Aerosol mass concentration measurements: Recent advancements of real-time nano/micro systems
Soysal, U., Géhin, E., Algré, E., Berthelot, B., Da, G., Robine, E.
Published in Journal of aerosol science (01.12.2017)
Published in Journal of aerosol science (01.12.2017)
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Journal Article
Optimization of ohmic contact and adhesion on polysilicon in MEMS–NEMS wet etching process
Herth, E., Algré, E., Legrand, B., Buchaillot, L.
Published in Microelectronic engineering (01.05.2011)
Published in Microelectronic engineering (01.05.2011)
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Journal Article
Conference Proceeding
Design and operation of a silicon ring resonator for force sensing applications above 1 MHz
Walter, B, Faucher, M, Algré, E, Legrand, B, Boisgard, R, Aimé, J-P, Buchaillot, L
Published in Journal of micromechanics and microengineering (01.11.2009)
Published in Journal of micromechanics and microengineering (01.11.2009)
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Journal Article
Performances of the Negative Tone Resist AZnLOF 2020 for Nanotechnology Applications
Herth, E., Algre, E., Tilmant, P., Francois, M., Boyaval, C., Legrand, B.
Published in IEEE transactions on nanotechnology (01.07.2012)
Published in IEEE transactions on nanotechnology (01.07.2012)
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Journal Article
Modeling and characterization of piezoelectric beams based on an aluminum nitride thin-film layer
Herth, Etienne, Algré, Emmanuelle, Rauch, Jean-Yves, Gerbedoen, Jean-Claude, Defrance, Nicolas, Delobelle, Patrick
Published in Physica status solidi. A, Applications and materials science (01.01.2016)
Published in Physica status solidi. A, Applications and materials science (01.01.2016)
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Journal Article
Surface microscopy with laserless MEMS based AFM probes
Algre, E, Legrand, B, Faucher, M, Walter, B, Buchaillot, L
Published in 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) (01.01.2010)
Published in 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) (01.01.2010)
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Conference Proceeding
Improved patterned media for probe-based heat assisted magnetic recording
Algre, E., Gaudin, G., Bsiesy, A., Nozieres, J.P.
Published in IEEE transactions on magnetics (01.10.2005)
Published in IEEE transactions on magnetics (01.10.2005)
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Journal Article
Conference Proceeding
Improved patterned media for probe-based HAMR
Algre, E., Gaudin, G., Bsiesy, A., Nozieres, J.P.
Published in INTERMAG Asia 2005. Digests of the IEEE International Magnetics Conference, 2005 (2005)
Published in INTERMAG Asia 2005. Digests of the IEEE International Magnetics Conference, 2005 (2005)
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Conference Proceeding
MEMS Ring Resonators for Laserless AFM With Sub-nanoNewton Force Resolution
Algre, E., Zhuang Xiong, Faucher, M., Walter, B., Buchaillot, L., Legrand, B.
Published in Journal of microelectromechanical systems (01.04.2012)
Published in Journal of microelectromechanical systems (01.04.2012)
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Journal Article
Tip-matter interaction measurements using mems ring resonators
Algre, E., Legrand, B., Faucher, M., Walter, B., Buchaillot1, L.
Published in TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference (01.06.2009)
Published in TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference (01.06.2009)
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Conference Proceeding
Improved patterned media for probe-based heat assisted magnetic recording
Algre, E., Gaudin, G., Bsiesy, A., Nozieres, J.P.
Published in IEEE transactions on magnetics (01.10.2005)
Published in IEEE transactions on magnetics (01.10.2005)
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Journal Article
12 years of resonator: From telephone to atomic force microscopy
Buchaillot, L., Legrand, B., Faucher, M., Walter, B., Algre, E., Xiong, Z.
Published in 2011 International Symposium on Micro-NanoMechatronics and Human Science (01.11.2011)
Published in 2011 International Symposium on Micro-NanoMechatronics and Human Science (01.11.2011)
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Conference Proceeding