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Year of Publication 23.04.2024
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RING STRUCTURES AND SYSTEMS FOR USE IN PLASMA CHAMBER
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Year of Publication 26.12.2023
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Year of Publication 21.05.2024
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Year of Publication 28.03.2019
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Year of Publication 28.03.2019
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PULSED PLASMA CHAMBER IN DUAL CHAMBER CONFIGURATION
ALEXEI MARAKHTANOV, ANDREW D BAILEY III, DHINDSA RAJINDER, HUDSON ERIC
Year of Publication 08.03.2018
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Year of Publication 08.03.2018
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MULTI-REGIME PLASMA WAFER PROCESSING TO INCREASE ION DIRECTIONALITY
KENNETH LUCCHESI, ALEXEI MARAKHTANOV, JOHN PATRICK HOLLAND, FELIX KOZAKEVICH, CHEN ZHIGANG, ZHAO LIN
Year of Publication 04.04.2019
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Year of Publication 04.04.2019
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SYSTEMS AND METHODS FOR ACHIEVING PREDETERMINED FACTOR ASSOCIATED WITH EDGE REGION WITHIN PLASMA CHAMBER BY SYNCHRONIZING MAIN AND EDGE RF GENERATORS
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Year of Publication 15.02.2018
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Year of Publication 15.02.2018
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MULTIFREQUENCY CAPACITIVELY COUPLED PLASMA ETCH CHAMBER
KOSHIISHI AKIRA, ALEXEI MARAKHTANOV, ANDREAS FISCHER, DHINDSA RAJINDER
Year of Publication 19.11.2015
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Year of Publication 19.11.2015
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