OPTIMIZATION OF RADIOFREQUENCY SIGNAL GROUND RETURN IN PLASMA PROCESSING SYSTEM
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Year of Publication 12.08.2021
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Year of Publication 12.08.2021
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RING STRUCTURES AND SYSTEMS FOR USE IN A PLASMA CHAMBER
MACE, Adam, KOZAKEVICH, Felix, HOLLAND, John, MARAKHTANOV, Alexei, KELLOGG, Michael, C, MATYUSHKIN, Alexander, CHEN, Zhigang
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Year of Publication 11.08.2021
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IMPEDANCE MATCH WITH AN ELONGATED RF STRAP
KOZAKEVICH, Felix Leib, HOLLAND, John, JI, Bing, BHOWMICK, Ranadeep, MARAKHTANOV, Alexei
Year of Publication 05.08.2021
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Year of Publication 05.08.2021
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High speed synchronization of plasma source/bias power delivery
Fisk, II, Larry J, Bhowmick, Ranadeep, Radomski, Aaron T, Kozakevich, Felix Leib, Gitlin, Benjamin J, Smyka, Jonathan W, Ji, Bing, Holland, John, Oldziej, Mariusz, Marakhtanov, Alexei, Burry, Aaron M
Year of Publication 19.03.2024
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Year of Publication 19.03.2024
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Electrostatic chuck design for cooling-gas light-up prevention
Kozakevich, Felix, Holland, John Patrick, Marakhtanov, Alexei, Matyushkin, Alexander, Gaff, Keith
Year of Publication 01.06.2021
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Year of Publication 01.06.2021
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SYSTEMS AND METHODS FOR OPTIMIZING POWER DELIVERY TO AN ELECTRODE OF A PLASMA CHAMBER
KOZAKEVICH, Felix, HOLLAND, John, BHOWMICK, Ranadeep, JI, Bing, MARAKHTANOV, Alexei
Year of Publication 08.04.2021
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Year of Publication 08.04.2021
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Active control of radial etch uniformity
Lucchesi, Kenneth, Kozakevich, Felix Leib, Ji, Bing, Holland, John, Marakhtanov, Alexei
Year of Publication 09.02.2021
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Year of Publication 09.02.2021
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SYSTEMS AND METHODS FOR CLEANING AN EDGE RING POCKET
BRIGGS, Scott, KOZAKEVICH, Felix, HOLLAND, John, MARAKHTANOV, Alexei, LUCCHESI, Kenneth, HUDSON, Eric
Year of Publication 04.02.2021
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Year of Publication 04.02.2021
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