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3D heterostructures and systems for novel MEMS/NEMS
by
Yakovlevich Prinz, Victor
,
Alexandrovich Seleznev
,
Vladimir
,
Victorovich Prinz, Alexander
,
Vladimirovich Kopylov, Alexander
Published in
Science and technology of advanced materials
(01.06.2009)
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engineering
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focus topical reviews
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materials science
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materials science, multidisciplinary
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mems/nems heterostructures
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micro-electro-mechanical systems
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nano-electro-mechanical systems
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