Development of controlled nanosphere lithography technology
Osipov, Artem A, Gagaeva, Alina E, Speshilova, Anastasiya B, Endiiarova, Ekaterina V, Bespalova, Polina G, Osipov, Armenak A, Belyanov, Ilya A, Tyurikov, Kirill S, Tyurikova, Irina A, Alexandrov, Sergey E
Published in Scientific reports (27.02.2023)
Published in Scientific reports (27.02.2023)
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Journal Article
OES diagnostics as a universal technique to control the Si etching structures profile in ICP
Osipov, Artem A, Iankevich, Gleb A, Speshilova, Anastasia B, Gagaeva, Alina E, Osipov, Armenak A, Enns, Yakov B, Kazakin, Alexey N, Endiiarova, Ekaterina V, Belyanov, Ilya A, Ivanov, Viktor I, Alexandrov, Sergey E
Published in Scientific reports (28.03.2022)
Published in Scientific reports (28.03.2022)
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Journal Article
High-temperature etching of SiC in SF6/O2 inductively coupled plasma
Osipov, Artem A., Iankevich, Gleb A., Speshilova, Anastasia B., Osipov, Armenak A., Endiiarova, Ekaterina V., Berezenko, Vladimir I., Tyurikova, Irina A., Tyurikov, Kirill S., Alexandrov, Sergey E.
Published in Scientific reports (17.11.2020)
Published in Scientific reports (17.11.2020)
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Journal Article
Deep Etching of LiNbO3 Using Inductively Coupled Plasma in SF6-Based Gas Mixture
Osipov, Artem A., Osipov, Armenak A., Iankevich, Gleb A., Speshilova, Anastasiya B., Shakhmin, Alexander, Berezenko, Vladimir I., Alexandrov, Sergey E.
Published in Journal of microelectromechanical systems (01.02.2021)
Published in Journal of microelectromechanical systems (01.02.2021)
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Journal Article
TOF MS Investigation of Nickel Oxide CVD
Kondrateva, Anastasia S., Mishin, Maxim V., Alexandrov, Sergey E.
Published in Journal of the American Society for Mass Spectrometry (01.11.2017)
Published in Journal of the American Society for Mass Spectrometry (01.11.2017)
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Journal Article
OES diagnostics of NF3/Xe plasma for deep structures in LiNbO3
Osipov, Artem A, Gagaeva, Alina E, Speshilova, Anastasiya B, Osipov, Armenak A, Alexandrov, Sergey E
Published in Journal of physics. Conference series (01.12.2022)
Published in Journal of physics. Conference series (01.12.2022)
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Journal Article
The effect of a lithium niobate heating on the etching rate in SF6 ICP plasma
Osipov, Artem A, Alexandrov, Sergey E, Iankevich, Gleb A
Published in Materials research express (11.01.2019)
Published in Materials research express (11.01.2019)
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Journal Article
Chain Assemblies from Nanoparticles Synthesized by Atmospheric Pressure Plasma Enhanced Chemical Vapor Deposition: The Computational View
Mishin, Maxim V, Zamotin, Kirill Y, Protopopova, Vera S, Alexandrov, Sergey E
Published in Journal of nanoscience and nanotechnology (01.12.2015)
Published in Journal of nanoscience and nanotechnology (01.12.2015)
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Journal Article
Experimental study of fractal clusters formation from nanoparticles synthesized by atmospheric pressure plasma-enhanced chemical vapor deposition
Mishin, Maxim V., Protopopova, Vera S., Alexandrov, Sergey E.
Published in Journal of nanoparticle research : an interdisciplinary forum for nanoscale science and technology (01.11.2014)
Published in Journal of nanoparticle research : an interdisciplinary forum for nanoscale science and technology (01.11.2014)
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Journal Article
Low‐Temperature Atmospheric Pressure Plasma‐Enhanced CVD of Nanocomposite Coatings “Molybdenum Disulfide (Filler)–Silicon Oxide (Matrix)”
Alexandrov, Sergey E., Tyurikov, Kirill S., Kirilenko, Demid A., Redkov, Alexey V., Lipovskii, Andrey A.
Published in Advanced materials interfaces (22.09.2017)
Published in Advanced materials interfaces (22.09.2017)
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Journal Article
A computational view on vapour phase coagulation of nanoparticles synthesized by atmospheric pressure PECVD
Mishin, Maxim V., Zamotin, Kirill Y., Protopopova, Vera S., Uvarov, Andrey A., Filatov, Leonid A., Baryshnikova, Marina V., Boricheva, Irina K., Alexandrov, Sergey E.
Published in Physica status solidi. C (01.07.2015)
Published in Physica status solidi. C (01.07.2015)
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Journal Article
OES diagnostics of NF 3 /Xe plasma for deep structures in LiNbO 3
Osipov, Artem A, Gagaeva, Alina E, Speshilova, Anastasiya B, Osipov, Armenak A, Alexandrov, Sergey E
Published in Journal of physics. Conference series (01.12.2022)
Published in Journal of physics. Conference series (01.12.2022)
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Journal Article