Properties of SiOxNy films deposited by LPCVD from SiH4/N2O/NH3 gaseous mixture
TEMPLE-BOYER, P, HAJJI, B, ALAY, J. L, MORANTE, J. R, MARTINEZ, A
Published in Sensors and actuators. A, Physical (20.04.1999)
Published in Sensors and actuators. A, Physical (20.04.1999)
Get full text
Conference Proceeding
Journal Article
Correlation between XPS, Raman and TEM measurements and the gas sensitivity of Pt and Pd doped SnO2 based gas sensors
KAPPLER, J, BARSAN, N, WEIMAR, U, DIEGUEZ, A, ALAY, J. L, ROMANO-RODRIGUEZ, A, MORANTE, J. R, GÖPEL, W
Published in Fresenius' journal of analytical chemistry (01.05.1998)
Published in Fresenius' journal of analytical chemistry (01.05.1998)
Get full text
Journal Article
Parameter optimisation in SnO2 gas sensors for NO2 detection with low cross-sensitivity to CO: sol–gel preparation, film preparation, powder calcination, doping and grinding
Diéguez, A, Romano-Rodrı́guez, A, Alay, J.L, Morante, J.R, Bârsan, N, Kappler, J, Weimar, U, Göpel, W
Published in Sensors and actuators. B, Chemical (30.06.2000)
Published in Sensors and actuators. B, Chemical (30.06.2000)
Get full text
Journal Article
Breakdown properties of metal/NIDOS SiO2/silicon structures
TEMPLE-BOYER, P, OLIVIE, F, SCHEID, E, SARRABAYROUSE, G, ALAY, J. L, MORANTE, J. R
Published in Microelectronics and reliability (01.02.1999)
Published in Microelectronics and reliability (01.02.1999)
Get full text
Conference Proceeding
Journal Article
In situ observation by RBS of oxygen gettering during Cs sputtering of Si-based materials
De Coster, W., Brijs, B., Deleu, J., Alay, J., Vandervorst, W.
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.09.1996)
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.09.1996)
Get full text
Journal Article
RBS, AES and XPS analysis of ion beam induced nitridation of Si and SiGe alloys
Get full text
Journal Article
Conference Proceeding
Quantitative analysis of tunneling current through ultrathin gate oxides
YOSHIDA, T, IMAFUKU, D, ALAY, J. L, MIYAZAKI, S, HIROSE, M
Published in Japanese Journal of Applied Physics (1995)
Published in Japanese Journal of Applied Physics (1995)
Get full text
Journal Article
Correlation between XPS, Raman and TEM measurements and the gas sensitivity of Pt and Pd doped SnO 2 based gas sensors
Kappler, J., Bârsan, N., Weimar, U., Dièguez, A., Alay, J. L., Romano-Rodriguez, A., Morante, J. R., Göpel, W.
Published in Fresenius' journal of analytical chemistry (13.05.1998)
Published in Fresenius' journal of analytical chemistry (13.05.1998)
Get full text
Journal Article
Critical parameters for obtaining low particle densities on a Si surface in an HF-last process
ALAY, J.-L, VERHAVERBEKE, S, VANDERVORST, W, HEYNS, M
Published in Japanese Journal of Applied Physics (1993)
Published in Japanese Journal of Applied Physics (1993)
Get full text
Conference Proceeding
Journal Article
Breakdown properties of metal/NIDOS SiO sub(2)/silicon structures
Temple-Boyer, P, Olivie, F, Scheid, E, Sarrabayrouse, G, Alay, J L, Morante, J R
Published in Microelectronics and reliability (01.01.1999)
Get full text
Published in Microelectronics and reliability (01.01.1999)
Journal Article
A high-selectivity native oxide removal process for native oxide free processes
Verhaverbeke, Iacovacci, Mertens, Meuris, Heyns, Schreutelkamp, Maex, Alay, Vandervorst, De Blank, Kubota, Philipossian
Published in 1992 International Technical Digest on Electron Devices Meeting (1992)
Published in 1992 International Technical Digest on Electron Devices Meeting (1992)
Get full text
Conference Proceeding