Calibration stability of scanning electron microscopes
Zablotskii, A. V., Al’zoba, V. V., Morozov, S. A., Todua, P. A.
Published in Measurement techniques (01.09.2013)
Published in Measurement techniques (01.09.2013)
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Scan nonlinearity of a scanning electron microscope
Alzoba, V. V., Gavrilenko, V. P., Kuzin, A. Yu, Mityukhlyaev, V. B., Rakov, A. V., Todua, P. A., Filippov, M. N.
Published in Measurement techniques (01.12.2012)
Published in Measurement techniques (01.12.2012)
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Journal Article
Selection of optimal parameters of the electronic probe of a scanning electron microscope in measurement of the geometric parameters of objects by means of a defocusing probe
Alzoba, V. V., Kuzin, A. Yu, Larionov, Yu. V., Rakov, A. V., Todua, P. A., Filippov, M. N.
Published in Measurement techniques (01.11.2012)
Published in Measurement techniques (01.11.2012)
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Journal Article
Nonlinearity estimation of scanning on a scanning electron microscope
Alzoba, V. V., Danilova, M. A., Kuzin, A. Yu, Mityukhlyaev, V. B., Rakov, A. V., Todua, P. A., Filippov, M. N.
Published in Russian microelectronics (01.11.2012)
Published in Russian microelectronics (01.11.2012)
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Journal Article