GaAs surface passivation by plasma-enhanced atomic-layer-deposited aluminum nitride
Bosund, M., Mattila, P., Aierken, A., Hakkarainen, T., Koskenvaara, H., Sopanen, M., Airaksinen, V.-M., Lipsanen, H.
Published in Applied surface science (01.10.2010)
Published in Applied surface science (01.10.2010)
Get full text
Journal Article
Investigation of sub-nm ALD aluminum oxide films by plasma assisted etch-through
Get full text
Journal Article
Conference Proceeding
Coating of nanoporous membranes: atomic layer deposition versus sputtering
Grigoras, K, Airaksinen, V M, Franssila, S
Published in Journal of nanoscience and nanotechnology (01.06.2009)
Published in Journal of nanoscience and nanotechnology (01.06.2009)
Get more information
Journal Article
Nonlinear fitness–space–structure adaptation and principal component analysis in genetic algorithms: an application to x-ray reflectivity analysis
Tiilikainen, J, Tilli, J-M, Bosund, V, Mattila, M, Hakkarainen, T, Airaksinen, V-M, Lipsanen, H
Published in Journal of physics. D, Applied physics (07.01.2007)
Published in Journal of physics. D, Applied physics (07.01.2007)
Get full text
Journal Article
Transfer of thin Si layers by cold and thermal ion cutting
HENTTINEN, K, SUNI, T, NURMELA, A, LUOTO, H. V. A, SUNI, I, AIRAKSINEN, V.-M, KARIRINNE, S, CAI, M, LAU, S. S
Published in Journal of materials science. Materials in electronics (01.05.2003)
Published in Journal of materials science. Materials in electronics (01.05.2003)
Get full text
Conference Proceeding
Journal Article
Cold ion-cutting of hydrogen implanted Si
Henttinen, K., Suni, T., Nurmela, A., Suni, I., Lau, S.S., Höchbauer, T., Nastasi, M., Airaksinen, V.-M.
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.05.2002)
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.05.2002)
Get full text
Journal Article
Observation of a vacancy at the DX center in Si- and Sn-doped AlGaAs
Mäkinen, J, Laine, T, Saarinen, K, Hautojärvi, P, Corbel, C, Airaksinen, VM, Gibart, P
Published in Physical review letters (08.11.1993)
Published in Physical review letters (08.11.1993)
Get more information
Journal Article
Fabrication of ultrathin silicon dioxide layers in ultra high vacuum
Get full text
Journal Article
Conference Proceeding
Fast Dry Fabrication Process with Ultra-Thin Atomic Layer Deposited Mask for Released MEMS-Devices with High Electromechanical Coupling
Koskenvuori, M., Chekurov, N., Airaksinen, V.-M., Tittonen, I.
Published in TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference (01.06.2007)
Published in TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference (01.06.2007)
Get full text
Conference Proceeding
Growth of silicon carbide on (100) silicon substrates by molecular beam epitaxy
Airaksinen, V M, Kaitila, J, Niemi, H, Lahtinen, J, Saarilahti, J
Published in Physica scripta (01.01.1994)
Published in Physica scripta (01.01.1994)
Get full text
Journal Article
X-ray diffraction analysis of superlattices grown on misoriented substrates
Ravila, P., Airaksinen, V.M., Lipsanen, H., Tuomi, T., Claxton, P.A.
Published in Journal of crystal growth (01.12.1991)
Published in Journal of crystal growth (01.12.1991)
Get full text
Journal Article
Fabrication of nanostructures using MBE and MOVPE
Ahopelto, J, Lipsanen, H K, Sopanen, M, Koljonen, T, Tuomi, T, Airaksinen, V M, Sinkkonen, J, Sirén, E
Published in Physica scripta (01.01.1994)
Published in Physica scripta (01.01.1994)
Get full text
Journal Article
Erratum to “GaAs surface passivation by plasma-enhanced atomic-layer-deposited aluminum nitride” [Appl. Surf. Sci. 256 (2010) 7434–7437]
Bosund, M., Mattila, P., Aierken, A., Hakkarainen, T., Koskenvaara, H., Sopanen, M., Airaksinen, V.-M., Lipsanen, H.
Published in Applied surface science (2011)
Published in Applied surface science (2011)
Get full text
Journal Article