Scribe Line Defect-Induced Yield Loss in FINFET Technology
Khatkhatay, Fauzia, Wang, Haiting, Gupta, Amit, Lee, Julie, Ali, Towshif, Kaule, Joseph Matthew, Popova, Ludmila, Huang, Chih-Chieh, Lee, Hye Jin, Zang, Yining, Ahn, Ki Cheol, Tsao, Chiahao, Lee, Tae Hoon, Mahalingam, Thirukumaran
Published in IEEE transactions on semiconductor manufacturing (01.11.2019)
Published in IEEE transactions on semiconductor manufacturing (01.11.2019)
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Journal Article
Impact of scribe line (kerf) defectivity on wafer yield
Khatkhatay, Fauzia, Popova, Ludmila, Huang, Chih-Chieh, Lee, Hye Jin, Zang, Yining, Ahn, Ki Cheol, Tsao, ChiaHao, Lee, Tae Hoon, Mahalingam, Thirukumaran, Wang, Haiting, Gupta, Amit, Lee, Julie, Ali, Towshif, Kaule, Joseph Matthew
Published in 2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.04.2018)
Published in 2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.04.2018)
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Conference Proceeding
An off-line automatic teaching by vision information for robotic assembly task
Cheol Ki Ahn, Min Cheol Lee
Published in 2000 26th Annual Conference of the IEEE Industrial Electronics Society. IECON 2000. 2000 IEEE International Conference on Industrial Electronics, Control and Instrumentation. 21st Century Technologies (2000)
Published in 2000 26th Annual Conference of the IEEE Industrial Electronics Society. IECON 2000. 2000 IEEE International Conference on Industrial Electronics, Control and Instrumentation. 21st Century Technologies (2000)
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Conference Proceeding
Aggressive Pitch Scaling (sub-0.5 μm) of W2W Hybrid Bonding Through Process Innovations
Sherwood, Tyler, Patlolla, Raghuveer, Salfelder, Joe, Kasbauer, Thomas, Sreenivasan, Raghav, Li, Kun, Ley, Ryan, Probst, Gernot, Appell, Jason, Ahn, Ki Cheol, Gorchichko, Masha, Uhrmann, Thomas
Published in 2023 IEEE 73rd Electronic Components and Technology Conference (ECTC) (01.05.2023)
Published in 2023 IEEE 73rd Electronic Components and Technology Conference (ECTC) (01.05.2023)
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Conference Proceeding
Chemical mechanical polishing for copper dishing control
Ma, Kai, Salfelder, Joseph F, Sreenivasan, Raghav, Appell, Jason, Sherwood, Tyler, Ahn, Ki Cheol
Year of Publication 09.07.2024
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Year of Publication 09.07.2024
Patent
CHEMICAL MECHANICAL POLISHING FOR COPPER DISHING CONTROL
Ma, Kai, Salfelder, Joseph F, Sreenivasan, Raghav, Appell, Jason, Sherwood, Tyler, Ahn, Ki Cheol
Year of Publication 02.03.2023
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Year of Publication 02.03.2023
Patent
Edge protection on semiconductor substrates
Nourbakhsh, Amirhasan, Fronckowiak, Michael Jason, Yu, Lan, Krishnan, Siddarth, Chen, Xing, Salfelder, Joseph F, Sherwood, Tyler, Ahn, Ki Cheol
Year of Publication 28.11.2023
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Year of Publication 28.11.2023
Patent
Gas diffusion layer comprising microporous layer including carbon having partially graphitized structure and radical scavenger additive, and fuel cell employing the same
Kim, Eun Chong, Choi, Jae Young, Jyoung, Jy Young, Lee, Eun Sook, Kang, Na Hee, Ryu, Jong Sik, Ahn, Ki Cheol
Year of Publication 24.10.2023
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Year of Publication 24.10.2023
Patent
EDGE PROTECTION ON SEMICONDUCTOR SUBSTRATES
Nourbakhsh, Amirhasan, Fronckowiak, Michael Jason, Yu, Lan, Krishnan, Siddarth, Chen, Xing, Salfelder, Joseph F, Sherwood, Tyler, Ahn, Ki Cheol
Year of Publication 29.09.2022
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Year of Publication 29.09.2022
Patent
EDGE PROTECTION ON SEMICONDUCTOR SUBSTRATES
SHERWOOD, Tyler, AHN, Ki Cheol, CHEN, Xing, KRISHNAN, Siddarth, SALFELDER, Joseph F, YU, Lan, NOURBAKHSH, Amirhasan, FRONCKOWIAK, Michael Jason
Year of Publication 29.09.2022
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Year of Publication 29.09.2022
Patent
GAS DIFFUSION LAYER COMPRISING MICROPOROUS LAYER INCLUDING CARBON HAVING PARTIALLY GRAPHITIZED STRUCTURE AND RADICAL SCAVENGER ADDITIVE, AND FUEL CELL EMPLOYING THE SAME
LEE, Eun Sook, RYU, Jong Sik, AHN, Ki Cheol, CHOI, Jae Young, KIM, Eun Chong, KANG, Na Hee, JYOUNG, Jy Young
Year of Publication 27.07.2022
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Year of Publication 27.07.2022
Patent
Gas Diffusion Layer Comprising Microporous Layer Including Carbon Having Partially Graphitized Structure and Radical Scavenger Additive, and Fuel Cell Employing the Same
Kim, Eun Chong, Choi, Jae Young, Jyoung, Jy Young, Lee, Eun Sook, Kang, Na Hee, Ryu, Jong Sik, Ahn, Ki Cheol
Year of Publication 21.07.2022
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Year of Publication 21.07.2022
Patent
THE LIFE SAVING FOR THE PUBLIC OF PERSONS AND RAILWAY LINE AN OPERATOR
KIM, SEONG GYOUN, LEE, JONG KYOO, CHOI, HYE OK, AHN, CHEOL KI, KANG, MIN KOO, KOO, JEONG SEO
Year of Publication 03.04.2007
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Year of Publication 03.04.2007
Patent
THE LIFE SAVING FOR THE PUBLIC OF PERSONS AND RAILWAY LINE AN OPERATOR
KIM, SEONG GYOUN, LEE, JONG KYOO, CHOI, HYE OK, AHN, CHEOL KI, KANG, MIN KOO, KOO, JEONG SEO
Year of Publication 03.04.2007
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Year of Publication 03.04.2007
Patent
Acquisition of 3-D information using stereo vision system by relative stereo disparity with subpixel resolution
Jang Kyu Kim, Min Cheol Lee, Cheol Ki Ahn, Chi Yen Kim
Published in ISIE 2001. 2001 IEEE International Symposium on Industrial Electronics Proceedings (Cat. No.01TH8570) (2001)
Published in ISIE 2001. 2001 IEEE International Symposium on Industrial Electronics Proceedings (Cat. No.01TH8570) (2001)
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Conference Proceeding