Micromachined porous silicon Fabry-Pérot long wavelength infrared filters
Afandi, Yaman, Parish, Gia, Keating, Adrian
Published in Sensors and actuators. A. Physical. (01.12.2021)
Published in Sensors and actuators. A. Physical. (01.12.2021)
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Journal Article
Surface micromachining multilayer porous silicon for spectral filtering applications
Afandi, Yaman, Parish, Giacinta, Keating, Adrian
Published in Materials science in semiconductor processing (01.02.2022)
Published in Materials science in semiconductor processing (01.02.2022)
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Journal Article
Compensating porosity gradient to produce flat, micromachined porous silicon structures
Afandi, Yaman, Parish, Giacinta, Keating, Adrian
Published in Microporous and mesoporous materials (01.08.2019)
Published in Microporous and mesoporous materials (01.08.2019)
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Journal Article
Study of Porosity Gradient in Released Porous Silicon Microstructures
Afandi, Yaman, Parish, Giacinta, Keating, Adrian
Published in 2018 Conference on Optoelectronic and Microelectronic Materials and Devices (COMMAD) (01.12.2018)
Published in 2018 Conference on Optoelectronic and Microelectronic Materials and Devices (COMMAD) (01.12.2018)
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Conference Proceeding
Released all-porous-silicon microstructure for spectrometer applications
Sun, Xiao, Afandi, Yaman, Parish, Giacinta, Keating, Adrian
Published in 2018 Conference on Optoelectronic and Microelectronic Materials and Devices (COMMAD) (01.12.2018)
Published in 2018 Conference on Optoelectronic and Microelectronic Materials and Devices (COMMAD) (01.12.2018)
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Conference Proceeding