Photon Influence on P and B Diffusion
Aderhold, W, Hunter, A, Felch, S B, Ranish, J
Published in Ion Implantation Technology 2008 (01.01.2008)
Published in Ion Implantation Technology 2008 (01.01.2008)
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Journal Article
Electrical properties of thin reoxidized dual-layer oxides
Bauer, A.J., Wang, J., Aderhold, W.R., Burte, E.P., Ryssel, H.
Published in Thin solid films (10.08.1993)
Published in Thin solid films (10.08.1993)
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Journal Article
Ultralow-resistivity CMOS contact scheme with pre-contact amorphization plus Ti (germano-)silicidation
Yu, H., Schaekers, M., Hikavyy, A., Rosseel, E., Peter, A., Hollar, K., Khaja, F. A., Aderhold, W., Date, L., Mayur, A. J., Lee, J.-G, Shin, K. M., Douhard, B., Chew, S. A., Demuynck, S., Kubicek, S., Kim, D., Mocuta, A., Barla, K., Horiguchi, N., Collaert, N., Thean, A. V.-Y, De Meyer, K.
Published in 2016 IEEE Symposium on VLSI Technology (01.06.2016)
Published in 2016 IEEE Symposium on VLSI Technology (01.06.2016)
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Conference Proceeding
Sub-10−9 Ω·cm2 contact resistivity on p-SiGe achieved by Ga doping and nanosecond laser activation
Everaert, J-L, Schaekers, M., Yu, H., Wang, L-L, Hikavyy, A., Date, L., del Agua Borniquel, J., Hollar, K., Khaja, F. A., Aderhold, W., Mayur, A. J., Lee, J. Y., van Meer, H., Jiang, Y-L, De Meyer, K., Mocuta, D., Horiguchi, N.
Published in 2017 Symposium on VLSI Technology (01.06.2017)
Published in 2017 Symposium on VLSI Technology (01.06.2017)
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Conference Proceeding
Reduction of pattern effects in RTP Centura system
Aderhold, W., Poarch, S., Hunter, A.
Published in 10th IEEE International Conference of Advanced Thermal Processing of Semiconductors (2002)
Published in 10th IEEE International Conference of Advanced Thermal Processing of Semiconductors (2002)
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Conference Proceeding
RTP for shallow junction formation-monitoring with repeatable, reliable sheet resistance measurements
Aderhold, W., Jain, A., Foad, M., Mayur, A.
Published in 2000 International Conference on Ion Implantation Technology Proceedings. Ion Implantation Technology - 2000 (Cat. No.00EX432) (2000)
Published in 2000 International Conference on Ion Implantation Technology Proceedings. Ion Implantation Technology - 2000 (Cat. No.00EX432) (2000)
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Conference Proceeding
Thermal processing for continued scaling of semiconductor devices
Sharma, S., Aderhold, W., Raman Sharma, K., Mayur, A. J.
Published in 2014 20th International Conference on Ion Implantation Technology (IIT) (01.06.2014)
Published in 2014 20th International Conference on Ion Implantation Technology (IIT) (01.06.2014)
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Conference Proceeding
Use of Virtual Metrology for in-situ Visualization of Thermal Uniformity and Handoff Adjustment in RTP Critical Anneals
Vitale, V., Aderhold, W., Hunter, A., Iliopoulos, I., Kroupnova, N., Yanovich, A., Merry, N.
Published in 2008 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (01.05.2008)
Published in 2008 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (01.05.2008)
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Conference Proceeding
Comprehensive study of Ga activation in Si, SiGe and Ge with 5 × 10−10 Ω·cm2 contact resistivity achieved on Ga doped Ge using nanosecond laser activation
Lin-Lin Wang, Hao Yu, Schaekers, M., Everaert, J.-L, Franquet, A., Douhard, B., Date, L., del Agua Borniquel, J., Hollar, K., Khaja, F. A., Aderhold, W., Mayur, A. J., Lee, J. Y., van Meer, H., Mocuta, D., Horiguchi, N., Collaert, N., De Meyer, K., Yu-Long Jiang
Published in 2017 IEEE International Electron Devices Meeting (IEDM) (01.12.2017)
Published in 2017 IEEE International Electron Devices Meeting (IEDM) (01.12.2017)
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Conference Proceeding
Virtual Metrology in RTP with WISR
Aderhold, W., Iliopoulos, I., Hunter, A.
Published in 2007 15th International Conference on Advanced Thermal Processing of Semiconductors (01.10.2007)
Published in 2007 15th International Conference on Advanced Thermal Processing of Semiconductors (01.10.2007)
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Conference Proceeding
The Influence of Cleaning on SiO2 Growth
Wiget, R., Ryssel, H., Aderhold, W.
Published in ESSDERC '89: 19th European Solid State Device Research Conference (01.09.1989)
Published in ESSDERC '89: 19th European Solid State Device Research Conference (01.09.1989)
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Conference Proceeding