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Year of Publication 02.01.2024
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Year of Publication 26.10.2021
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OVERLAY MEASUREMENT USING MULTIPLE WAVELENGTHS
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Year of Publication 03.12.2020
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ACCURACY IMPROVEMENTS IN OPTICAL METROLOGY
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Year of Publication 08.12.2021
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Year of Publication 08.12.2021
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ACCURACY IMPROVEMENTS IN OPTICAL METROLOGY
Yaziv, Tal, Gurevich, Evgeni, Leviant, Tom, Alumot, Dror, Sella, Noga, Ashwal-Island, Eltsafon, Bringoltz, Barak, Feler, Yoel, Lamhot, Yuval, Adam, Ido, De Leeuw, Yaron, Saltoun, Lilach
Year of Publication 10.06.2021
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Year of Publication 10.06.2021
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Method for semiconductor device metrology, non-transitory computer readable medium, and metrology unit
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Year of Publication 01.11.2023
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Year of Publication 01.11.2023
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Overlay measurement using multiple wavelengths
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Year of Publication 11.10.2023
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Year of Publication 11.10.2023
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ACCURACY IMPROVEMENTS IN OPTICAL METROLOGY
BRINGOLTZ, Barak, FELER, Yoel, SALTOUN, Lilach, GUREVICH, Evgeni, LEVIANT, Tom, ADAM, Ido, SELLA, Noga, ASHWAL, Eltsafon, ALUMOT, Dror, YAZIV, Tal, DELEEUW, Yaron, LAMHOT, Yuval
Year of Publication 15.01.2020
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Year of Publication 15.01.2020
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ACCURACY IMPROVEMENTS IN OPTICAL METROLOGY
BRINGOLTZ, Barak, FELER, Yoel, SALTOUN, Lilach, GUREVICH, Evgeni, LEVIANT, Tom, ADAM, Ido, SELLA, Noga, ASHWAL, Eltsafon, ALUMOT, Dror, YAZIV, Tal, DELEEUW, Yaron, LAMHOT, Yuval
Year of Publication 02.01.2019
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Year of Publication 02.01.2019
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Accuracy enhancement for optical metrology
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Year of Publication 24.10.2023
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Year of Publication 24.10.2023
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Method of analyzing and utilizing landscapes to reduce or eliminate inaccuracy in overlay optical metrology
Yaziv, Tal, Ashwal, Eltsafon, Gurevich, Evgeni, Sella, Noga, Manassen, Amnon, Bringoltz, Barak, Sulimarski, Roee, Amir, Nuriel, Handelman, Amir, Saltoun, Lilach, Zhao, Zeng, Zaharan, Ofer, Carmel, Nadav, Cooper, Moshe, Leviant, Tom, Marciano, Tal, Lindenfeld, Ze'ev, Kandel, Daniel, Bachar, Ohad, Feler, Yoel, Adam, Ido, Kaminsky, Oded, Efraty, Boris
Year of Publication 10.11.2020
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Year of Publication 10.11.2020
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