Effect of substrate on the growth and properties of MoS2 thin films grown by plasma-enhanced atomic layer deposition
Mughal, Asad J., Walter, Timothy N., Cooley, Kayla A., Bertuch, Adam, Mohney, Suzanne E.
Published in Journal of vacuum science & technology. A, Vacuum, surfaces, and films (01.01.2019)
Published in Journal of vacuum science & technology. A, Vacuum, surfaces, and films (01.01.2019)
Get full text
Journal Article
Implant Metrology for Bonded SOI Wafers using a Surface Photo-Voltage Technique
Bertuch, Adam F., Smith, Wesley, Steeples, Kenneth, Standley, Robert, Stefanescu, Anca, Johnson, Ron
Published in ECS transactions (27.04.2007)
Published in ECS transactions (27.04.2007)
Get full text
Journal Article
Effects of “fast” rapid thermal anneals on sub-keV boron and BF2 ion implants
Downey, Daniel F., Falk, Scott W., Bertuch, Adam F., Marcus, Steven D.
Published in Journal of electronic materials (01.12.1999)
Published in Journal of electronic materials (01.12.1999)
Get full text
Journal Article
(Invited) Large Format Atomic Layer Deposition
Sundaram, Ganesh M., Bertuch, Adam, Bhatia, Ritwik, Coutu, R., Dalberth, Mark J., Deguns, Eric, Liu, Guo, Sowa, Mark J., Becker, Jill S.
Published in ECS transactions (01.01.2010)
Published in ECS transactions (01.01.2010)
Get full text
Journal Article