Design and Chemistry of Advanced Deep-UV Photoresists
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Published in Journal of photopolymer science and technology (10.08.1999)
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Published in Journal of photopolymer science and technology (10.08.1999)
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Year of Publication 26.10.2006
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Year of Publication 26.10.2006
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Radiation sensitive composition comprising polymer having inert blocking groups
THACKERAY, JAMES W, DENISON, MARK D, ORSULA, GEORGE W, SINTA, ROGER, ABLAZA, SHERI L
Year of Publication 03.03.2004
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Year of Publication 03.03.2004
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