Simulating fabrication and imprinting distortions in step-and-flash imprint lithography templates
Abdo, A.Y., Zheng, L., Wei, A., Mikkelson, A., Nellis, G., Engelstad, R.L., Lovell, E.G.
Published in Microelectronic engineering (01.06.2004)
Published in Microelectronic engineering (01.06.2004)
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