DSA grapho-epitaxy process with etch stop material
YIN YUNPENG, SANKARAPANDIAN MUTHUMANICKAM, HOLMES STEVEN J, LIU CHIUN, ABDALLAH JASSEM A, KAWAMURA DAIJI, COLBURN MATTHEW E
Year of Publication 14.10.2014
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Year of Publication 14.10.2014
Patent
DSA GRAPHO-EPITAXY PROCESS WITH ETCH STOP MATERIAL
YIN YUNPENG, SANKARAPANDIAN MUTHUMANICKAM, HOLMES STEVEN J, LIU CHIUN, ABDALLAH JASSEM A, KAWAMURA DAIJI, COLBURN MATTHEW E
Year of Publication 11.09.2014
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Year of Publication 11.09.2014
Patent