Monolithic CMOS MEMS Oscillator Circuit for Sensing in the Attogram Range
Verd, J., Uranga, A., Abadal, G., Teva, J.L., Torres, F., Lopez, J.L., Perez-Murano, E., Esteve, J., Barniol, N.
Published in IEEE electron device letters (01.02.2008)
Published in IEEE electron device letters (01.02.2008)
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Journal Article
Integration of RF-MEMS resonators on submicrometric commercial CMOS technologies
Lopez, J L, Verd, J, Teva, J, Murillo, G, Giner, J, Torres, F, Uranga, A, Abadal, G, Barniol, N
Published in Journal of micromechanics and microengineering (01.01.2009)
Published in Journal of micromechanics and microengineering (01.01.2009)
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Journal Article
A CMOS-MEMS RF-Tunable Bandpass Filter Based on Two High- Q 22-MHz Polysilicon Clamped-Clamped Beam Resonators
Lopez, J.L., Verd, J., Uranga, A., Giner, J., Murillo, G., Torres, F., Abadal, G., Barniol, N.
Published in IEEE electron device letters (01.07.2009)
Published in IEEE electron device letters (01.07.2009)
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Journal Article
Nanoporous silicalite-only cantilevers as micromechanical sensors: Fabrication, resonance response and VOCs sensing performance
Pellejero, I., Agustí, J., Urbiztondo, M.A., Sesé, J., Pina, M.P., Santamaría, J., Abadal, G.
Published in Sensors and actuators. B, Chemical (20.06.2012)
Published in Sensors and actuators. B, Chemical (20.06.2012)
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Journal Article
Integrated CMOS-MEMS with on-chip readout electronics for high-frequency applications
Verd, J., Uranga, A., Teva, J., Lopez, J.L., Torres, F., Esteve, J., Abadal, G., Perez-Murano, F., Barniol, N.
Published in IEEE electron device letters (01.06.2006)
Published in IEEE electron device letters (01.06.2006)
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Journal Article
Fabrication of monocrystalline 3C–SiC resonators for MHz frequency sensors applications
Placidi, M., Godignon, P., Mestres, N., Abadal, G., Ferro, G., Leycuras, A., Chassagne, T.
Published in Sensors and actuators. B, Chemical (28.07.2008)
Published in Sensors and actuators. B, Chemical (28.07.2008)
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Journal Article
Electromechanical model of a resonating nano-cantilever-based sensor for high-resolution and high-sensitivity mass detection
Abadal, G, Davis, Z J, Helbo, B, Borrisé, X, Ruiz, R, Boisen, A, Campabadal, F, Esteve, J, Figueras, E, Pérez-Murano, F, Barniol, N
Published in Nanotechnology (01.06.2001)
Published in Nanotechnology (01.06.2001)
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Journal Article
Conference Proceeding
Vibration energy harvesting via parametrically-induced bistability
Abadal, G, López, M, Venstra, W J, Murillo, G, Torres, F
Published in Journal of physics. Conference series (01.01.2014)
Published in Journal of physics. Conference series (01.01.2014)
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Journal Article
Zero-level packaging of MEMS in standard CMOS technology
Marigó, E, Lopez, J L, Murillo, G, Torres, F, Giner, J, Uranga, A, Abadal, G, Esteve, J, Barniol, N
Published in Journal of micromechanics and microengineering (01.06.2010)
Published in Journal of micromechanics and microengineering (01.06.2010)
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Journal Article
Conference Proceeding
Design, fabrication, and characterization of a submicroelectromechanical resonator with monolithically integrated CMOS readout circuit
Verd, J., Abadal, G., Teva, J., Gaudo, M.V., Uranga, A., Borrise, X., Campabadal, F., Esteve, J., Costa, E.F., Perez-Murano, F., Davis, Z.J., Forsen, E., Boisen, A., Barniol, N.
Published in Journal of microelectromechanical systems (01.06.2005)
Published in Journal of microelectromechanical systems (01.06.2005)
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Journal Article
A femtogram resolution mass sensor platform based on SOI electrostatically driven resonant cantilever. Part II: Sensor calibration and glycerine evaporation rate measurement
Teva, J., Abadal, G., Torres, F., Verd, J., Pérez-Murano, F., Barniol, N.
Published in Ultramicroscopy (01.06.2006)
Published in Ultramicroscopy (01.06.2006)
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Journal Article
Harvester-on-chip: Design of a proof of concept prototype
Murillo, G., Abadal, G., Torres, F., Lopez, J.L., Giner, J., Uranga, A., Barniol, N.
Published in Microelectronic engineering (01.04.2009)
Published in Microelectronic engineering (01.04.2009)
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Journal Article
Conference Proceeding
Fully integrated MIXLER based on VHF CMOS-MEMS clamped-clamped beam resonator
URANGA, A, VERD, J, LOPEZ, J. L, TEVA, J, ABADAL, G, TORRES, F, ESTEVE, J, PEREZ-MURANO, F, BARNIOL, N
Published in Electronics letters (12.04.2007)
Published in Electronics letters (12.04.2007)
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Journal Article
AFM lithography of aluminum for fabrication of nanomechanical systems
Davis, Z.J., Abadal, G., Hansen, O., Borisé, X., Barniol, N., Pérez-Murano, F., Boisen, A.
Published in Ultramicroscopy (01.10.2003)
Published in Ultramicroscopy (01.10.2003)
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Journal Article
Conference Proceeding
Electrochemical platinum coatings for improving performance of implantable microelectrode arrays
de Haro, C, Mas, R, Abadal, G, Muñoz, J, Perez-Murano, F, Domı́nguez, C
Published in Biomaterials (01.12.2002)
Published in Biomaterials (01.12.2002)
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Journal Article
Resonators with integrated CMOS circuitry for mass sensing applications, fabricated by electron beam lithography
Ghatnekar-Nilsson, S, Forsén, E, Abadal, G, Verd, J, Campabadal, F, Pérez-Murano, F, Esteve, J, Barniol, N, Boisen, A, Montelius, L
Published in Nanotechnology (01.01.2005)
Published in Nanotechnology (01.01.2005)
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Journal Article