Sputtered metal lift-off for grating fabrication on InP based optical devices
Magdenko, Liubov, Gaucher, Fabien, Aassime, Abdel, Vanwolleghem, Mathias, Lecoeur, Philippe, Dagens, Béatrice
Published in Microelectronic engineering (01.11.2009)
Published in Microelectronic engineering (01.11.2009)
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