On-chip Digitally Tunable High Voltage Generator for Electrostatic Control of Micromechanical Devices
Aaltonen, L., Saukoski, M., Halonen, K.
Published in IEEE Custom Integrated Circuits Conference 2006 (01.09.2006)
Published in IEEE Custom Integrated Circuits Conference 2006 (01.09.2006)
Get full text
Conference Proceeding
A High-Resolution Accelerometer With Electrostatic Damping and Improved Supply Sensitivity
Yucetas, M., Pulkkinen, M., Kalanti, A., Salomaa, J., Aaltonen, L., Halonen, K.
Published in IEEE journal of solid-state circuits (01.07.2012)
Published in IEEE journal of solid-state circuits (01.07.2012)
Get full text
Journal Article
Conference Proceeding
A 2.2 mA 4.3 mm ^ ASIC for a 1000 ^/s 2-Axis Capacitive Micro-Gyroscope
Aaltonen, L., Kalanti, A., Pulkkinen, M., Paavola, M., Kamarainen, M., Halonen, K. A. I.
Published in IEEE journal of solid-state circuits (01.07.2011)
Published in IEEE journal of solid-state circuits (01.07.2011)
Get full text
Journal Article
SPI interface, mux-based synchronizer and DSP unit for a MEMS-based accelerometer
Pulkkinen, Mika, Aaltonen, Lasse, Halonen, Kari
Published in 2015 IEEE International Symposium on Circuits and Systems (ISCAS) (01.05.2015)
Published in 2015 IEEE International Symposium on Circuits and Systems (ISCAS) (01.05.2015)
Get full text
Conference Proceeding
Interface and control electronics for a bulk micromachined capacitive gyroscope
Saukoski, Mikko, Aaltonen, Lasse, Salo, Teemu, Halonen, Kari A.I.
Published in Sensors and actuators. A. Physical. (15.09.2008)
Published in Sensors and actuators. A. Physical. (15.09.2008)
Get full text
Journal Article