VAPOR GROWTH APPARATUS
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Year of Publication 09.06.1987
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Year of Publication 09.06.1987
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APPARATUS FOR FORMING THIN FILM
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Year of Publication 09.06.1987
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Year of Publication 09.06.1987
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JP2550027B
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Year of Publication 30.10.1996
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Year of Publication 30.10.1996
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DEPOSITION DEVICE FOR METALLIC THIN FILM
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Year of Publication 29.01.1987
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Year of Publication 29.01.1987
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METHOD AND APPARATUS FOR CONNECTING LSI WIRING
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Year of Publication 22.10.1986
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Year of Publication 22.10.1986
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CORRECTION FOR LSI ALUMINUM WIRING AND DEVICE THEREOF
MIYAUCHI TAKEOKI, AZUMA JUNZO, HONGO MIKIO, FUKUZAWA KUNIYUKI, MIZUKOSHI KATSURO
Year of Publication 06.10.1986
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Year of Publication 06.10.1986
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ION BEAM PROCESSING DEVICE
HIROSE HIROSHI, MIZUMURA MICHINOBU, SHIMASE AKIRA, AZUMA JUNZO, HAMAMURA YUICHI, ITO FUMIKAZU
Year of Publication 18.03.1994
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Year of Publication 18.03.1994
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CHARGE BEAM PROCESSING DEVICE AND METHOD THEREFOR
HARAICHI SATOSHI, MIZUMURA MICHINOBU, SHIMASE AKIRA, AZUMA JUNZO, HAMAMURA YUICHI, YAMADA TOSHIO, ITO FUMIKAZU, KOIZUMI YASUHIRO
Year of Publication 18.02.1994
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Year of Publication 18.02.1994
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CHARGED-PARTICLE BEAM TREATMENT METHOD AND DEVICE THEREOF
HARAICHI SATOSHI, SHIMASE AKIRA, AZUMA JUNZO, TAKAHASHI TAKAHIKO, ITO FUMIKAZU, MORI JUNICHI
Year of Publication 03.07.1992
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Year of Publication 03.07.1992
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CHARGED BEAM WORKING EQUIPMENT
HARAICHI SATOSHI, SHIMASE AKIRA, AZUMA JUNZO, TAKAHASHI TAKAHIKO, ITO FUMIKAZU, MORI JUNICHI
Year of Publication 25.02.1992
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Year of Publication 25.02.1992
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SEMICONDUCTOR DEVICE HAVING IMPURITY CONDUCTOR CIRCUIT, AND METHOD AND DEVICE FOR MANUFACTURING SAME
HARAICHI SATOSHI, SHIMASE AKIRA, AZUMA JUNZO, TAKAHASHI TAKAHIKO, OKAMOTO EMIKO, ITO FUMIKAZU
Year of Publication 29.11.1991
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Year of Publication 29.11.1991
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APPARATUS AND METHOD FOR CHARGED PARTICLE BEAM PROCESSING
HARAICHI SATOSHI, SHIMASE AKIRA, AZUMA JUNZO, TAKAHASHI TAKAHIKO, ITO FUMIKAZU, MORI JUNICHI
Year of Publication 01.11.1991
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Year of Publication 01.11.1991
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METHOD AND APPARATUS FOR LOCAL PROCESSING OF ENERGY BEAM
HARAICHI SATOSHI, SHIMASE AKIRA, AZUMA JUNZO, TAKAHASHI TAKAHIKO, ITO FUMIKAZU, MORI JUNICHI
Year of Publication 28.10.1991
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Year of Publication 28.10.1991
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APPARATUS FOR PLASMA PROCESSING
OHTSUBO, TOHRU, USUAMI, HIROHISA, OHARA, KAZUHIRO, SASAKI, ICHIRO, AZUMA, JUNZO, TOKUDA, MITSUO, YAMAGUCHI, YASUHIRO
Year of Publication 17.07.1991
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Year of Publication 17.07.1991
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PROCESSING METHOD AND DEVICE USING FOCUSED ION BEAM GENERATING MEANS
MIZUMURA MICHINOBU, SHIMASE AKIRA, AZUMA JUNZO, KAWANAMI YOSHIMI, KAMIMURA TAKASHI, MADOKORO YUICHI, HAMAMURA YUICHI, UMEMURA KAORU, ITO FUMIKAZU
Year of Publication 08.12.1995
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Year of Publication 08.12.1995
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WIRING FORMATION
SANO HIDEZO, AZUMA JUNZO, HONGO MIKIO, TAKAHASHI TAKAHIKO, MIZUKOSHI KATSURO, KAMIMURA TAKASHI
Year of Publication 10.04.1991
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Year of Publication 10.04.1991
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CAVITY RESONANCE TYPE PLASMA TREATING DEVICE
YAMAGUCHI YASUHIRO, TOKUDA MITSUO, SASAKI ICHIRO, OHARA KAZUHIRO, AZUMA JUNZO, OTSUBO TORU, USUAMI HIROHISA
Year of Publication 20.08.1990
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Year of Publication 20.08.1990
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Apparatus for plasma processing
OHTSUBO, TOHRU, USUAMI, HIROHISA, OHARA, KAZUHIRO, SASAKI, ICHIRO, AZUMA, JUNZO, TOKUDA, MITSUO, YAMAGUCHI, YASUHIRO
Year of Publication 16.08.1990
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Year of Publication 16.08.1990
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LASER BEAM PROCESSING METHOD
HARAICHI SATOSHI, SANO HIDEZO, SHIMASE AKIRA, AZUMA JUNZO, HONGO MIKIO, AIUCHI SUSUMU, MIZUKOSHI KATSURO
Year of Publication 17.02.1988
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Year of Publication 17.02.1988
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