METHOD FOR CORRECTING DEFECT OF RETICLE AND RETICLE AS WELL AS PRODUCTION OF SEMICONDUCTOR
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Year of Publication 30.07.1999
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Year of Publication 30.07.1999
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ION BEAM PROCESS METHOD
HARAICHI SATOSHI, SHIMASE AKIRA, AZUMA JUNZO, TAKAHASHI TAKAHIKO, ITO FUMIKAZU
Year of Publication 22.04.1992
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Year of Publication 22.04.1992
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METHOD AND APPARATUS FOR VISUAL EXAMINATION
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Year of Publication 25.09.1998
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Year of Publication 25.09.1998
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OBSERVATION AND MACHINING METHOD BY CHARGED BEAM AND DEVICE THEREFOR
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Year of Publication 11.09.1998
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Year of Publication 11.09.1998
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SEMICONDUCTOR CHIP AND RETICLE FOR MANUFACTURE OF SEMICONDUCTOR
SUGIMOTO ARITOSHI, HIROI TAKASHI, AZUMA JUNZO, KUNI TOMOHIRO, TANAKA MAKI, MATSUYAMA YUKIO, TAKAGI YUJI
Year of Publication 31.07.1998
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Year of Publication 31.07.1998
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MANUFACTURING METHOD/DEVICE FOR SEMICONDUCTOR DEVICE
WATANABE MASAHIRO, SUGIMOTO ARITOSHI, HIROI TAKASHI, OOGAYA KAORU, AZUMA JUNZO, KUNI TOMOHIRO, TANAKA MAKI, ISHIKAWA SEIJI
Year of Publication 29.05.1998
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Year of Publication 29.05.1998
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PRODUCTION OF SEMICONDUCTOR AND INSPECTION METHOD THEREFOR, AND DEVICE THEREFOR
MIZUMURA MICHINOBU, SHIMASE AKIRA, AZUMA JUNZO, YOKOYAMA NATSUKI, HONGO MIKIO, MIZUKOSHI KATSURO, HAMAMURA YUICHI, ISHITANI TORU
Year of Publication 06.05.1998
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Year of Publication 06.05.1998
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METHOD AND EQUIPMENT FOR INSPECTING SEMICONDUCTOR DEVICE
WATANABE MASAHIRO, HIROI TAKASHI, OOGAYA KAORU, SHIMASE AKIRA, AZUMA JUNZO, KUNI TOMOHIRO, TANAKA MAKI, ITO FUMIKAZU
Year of Publication 16.01.1998
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Year of Publication 16.01.1998
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METHOD AND APPARATUS THEREOF FOR WIRING LAYING
SANO HIDEZO, AZUMA JUNZO, HONGO MIKIO, AIUCHI SUSUMU, MIZUKOSHI KATSURO
Year of Publication 02.05.1988
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Year of Publication 02.05.1988
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Apparatus for plasma processing
OHTSUBO, TOHRU, USUAMI, HIROHISA, OHARA, KAZUHIRO, SASAKI, ICHIRO, AZUMA, JUNZO, TOKUDA, MITSUO, YAMAGUCHI, YASUHIRO
Year of Publication 21.05.1997
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Year of Publication 21.05.1997
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FORMING METHOD FOR WIRINGS
SANO HIDEZO, AZUMA JUNZO, AIUCHI SUSUMU, HONGO MIKIO, MIZUKOSHI KATSURO
Year of Publication 05.03.1988
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Year of Publication 05.03.1988
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PATTERN INSPECTION DEVICE AND ITS MANUFACTURE
SUGIMOTO ARITOSHI, SHIMASE AKIRA, MURAKOSHI HISAYA, KOSHISHIBA HIROYA, AZUMA JUNZO, KUNI TOMOHIRO, USAMI YASUTSUGU, TANAKA MAKI, SHISHIDO CHIE, SHINADA HIROYUKI
Year of Publication 03.03.2000
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Year of Publication 03.03.2000
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LIQUID CRYSTAL DISPLAY ELEMENT
MIYAUCHI TAKEOKI, AZUMA JUNZO, SAITOU HIROTANI, HONGO MIKIO, MIZUKOSHI KATSURO
Year of Publication 17.10.1987
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Year of Publication 17.10.1987
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METHOD FOR WIRING OF SEMICONDUCTOR DEVICE
MIYAUCHI TAKEOKI, AZUMA JUNZO, HONGO MIKIO, SAITOU HIROTANI, MIZUKOSHI KATSURO
Year of Publication 08.10.1987
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Year of Publication 08.10.1987
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