OPTICAL MASK AND THE METHOD OF CORRECTING IT
ITOH, FUMIKAZA, HIRAICHI, SATOSHI, SHIMASE, AKIRA, AZUMA, JUNZOU, KOIZUMI, YASUHIRO
Year of Publication 03.02.1996
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Year of Publication 03.02.1996
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Sample processing apparatus and method for removing charge on sample through light irradiation
Nishimura, Norimasa, Shimase, Akira, Azuma, Junzou, Kuni, Asahiro, Koshishiba, Hiroya
Year of Publication 14.01.2003
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Year of Publication 14.01.2003
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Sample processing apparatus and method for removing charge on sample through light irradiation
KUNI ASAHIRO, AZUMA JUNZOU, SHIMASE AKIRA, KOSHISHIBA HIROYA, NISHIMURA NORIMASA
Year of Publication 14.01.2003
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Year of Publication 14.01.2003
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Visual inspection method and apparatus therefor
KUNI ASAHIRO, HIROI TAKASHI, MAEDA SHUNJI, AZUMA JUNZOU, TANAKA MAKI, MATSUYAMA YUKIO, SHISHIDO CHIE, TAKAGI YUJI
Year of Publication 01.07.2003
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Year of Publication 01.07.2003
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Visual inspection method and apparatus therefor
Matsuyama, Yukio, Takagi, Yuji, Hiroi, Takashi, Tanaka, Maki, Kuni, Asahiro, Azuma, Junzou, Maeda, Shunji, Shishido, Chie
Year of Publication 01.07.2003
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Year of Publication 01.07.2003
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Method and apparatus for observing or processing and analyzing using a charged beam
MIZUMURA MICHINOBU, AZUMA JUNZOU, SHIMASE AKIRA, NISHIMURA NORIMASA, HAMAMURA YUICHI, KOIKE HIDEMI, KOIZUMI YASUHIRO
Year of Publication 05.11.2002
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Year of Publication 05.11.2002
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Method and its apparatus for detecting a secondary electron beam image and a method and its apparatus for processing by using focused charged particle beam
MIZUMURA MICHINOBU, AZUMA JUNZOU, SHIMASE AKIRA, NISHIMURA NORIMASA, HAMAMURA YUICHI, KOIKE HIDEMI, KOIZUMI YASUHIRO
Year of Publication 16.10.2001
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Year of Publication 16.10.2001
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Optical mask and method of correcting the same
ITOH; FUMIKAZU, AZUMA; JUNZOU, KOIZUMI; YASUHIRO, SHIMASE; AKIRA, HARAICHI; SATOSHI
Year of Publication 08.08.1995
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Year of Publication 08.08.1995
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Processing apparatus and method for plasma processing
TOKUDA; MITSUO, SASAKI; ICHIROU, OTSUBO; TORU, YAMAGUCHI; YASUHIRO, AZUMA; JUNZOU
Year of Publication 04.08.1992
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Year of Publication 04.08.1992
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Processing method and apparatus using focused energy beam
ITOH; FUMIKAZU, TAKAHASHI; TAKAHIKO, UDA; EMIKO, AZUMA; JUNZOU, HARAICHI; SATOSHI, SHIMASE; AKIRA, MORI; JUNICHI
Year of Publication 04.11.1997
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Year of Publication 04.11.1997
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Phase shift mask, method of correcting the same and apparatus for carrying out the method
ITOH; FUMIKAZU, YAMAGUCHI; HIROSHI, AZUMA; JUNZOU, KOIZUMI; YASUHIRO, HARAICHI; SATOSHI, SHIMASE; AKIRA
Year of Publication 25.10.1994
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Year of Publication 25.10.1994
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Apparatus for processing a sample using a charged beam and reactive gases
YAMADA; TOSHIO, MIZUMURA; MICHINOBU, ITOH; FUMIKAZU, HAMAMURA; YUUICHI, AZUMA; JUNZOU, KOIZUMI; YASUHIRO, HARAICHI; SATOSHI, SHIMASE; AKIRA
Year of Publication 30.08.1994
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Year of Publication 30.08.1994
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