Mechanical stresses in silicon carbonitride films obtained by PECVD from hexamethyldisilazane
Shayapov, V.R., Rumyantsev, Yu.M., Dzyuba, A.A., Ayupov, B.M., Fainer, N.I.
Published in Applied surface science (15.01.2013)
Published in Applied surface science (15.01.2013)
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Synthesis of silicon carbonitride dielectric films with improved optical and mechanical properties from tetramethyldisilazane
Fainer, N. I., Golubenko, A. N., Rumyantsev, Yu. M., Kesler, V. G., Maximovskii, E. A., Ayupov, B. M., Kuznetsov, F. A.
Published in Glass physics and chemistry (2013)
Published in Glass physics and chemistry (2013)
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Chemical composition of boron carbonitride films grown by plasma-enhanced chemical vapor deposition from trimethylamineborane
KOSINOVA, M. L, RUMYANTSEV, Yu. M, GOLUBENKO, A. N, FAINER, N. I, AYUPOV, B. M, DOLGOVESOVA, I. P, KOLESOV, B. A, KAICHEV, V. V, KUZNETSOV, F. A
Published in Inorganic materials (01.04.2003)
Published in Inorganic materials (01.04.2003)
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Phase formation in the Li2MoO4-A2MoO4-NiMoO4 (A = K, Rb, Cs) systems, the crystal structure of Cs2Ni2(MoO4)3, and color characteristics of alkali-metal nickel molybdates
Zolotova, E. S., Solodovnikova, Z. A., Ayupov, B. M., Solodovnikov, S. F.
Published in Russian journal of inorganic chemistry (01.08.2011)
Published in Russian journal of inorganic chemistry (01.08.2011)
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Na2MoO4-CaMoO4-Ce2/3MoO4 scheelite-like solid solutions
Zolotova, E. S., Trushnikova, L. N., Ayupov, B. M., Sokolov, V. V., Daletskii, V. A.
Published in Inorganic materials (01.04.2009)
Published in Inorganic materials (01.04.2009)
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Properties of BCxNy films grown by plasma-enhanced chemical vapor deposition from N-trimethylborazine-nitrogen mixtures
Sulyaeva, V. S., Kosinova, M. L., Rumyantsev, Yu. M., Golubenko, A. N., Fainer, N. I., Alferova, N. I., Ayupov, B. M., Gevko, P. N., Kesler, V. G., Kolesov, B. A., Maksimovskii, E. A., Myakishev, K. G., Yushina, I. V., Kuznetsov, F. A.
Published in Inorganic materials (01.05.2010)
Published in Inorganic materials (01.05.2010)
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Color and chemical heterogeneities of γ-[Na]-Ce2S3 solid solutions
Vasilyeva, I.G., Ayupov, B.M., Vlasov, A.A., Malakhov, V.V., Macaudière, P., Maestro, P.
Published in Journal of alloys and compounds (27.03.1998)
Published in Journal of alloys and compounds (27.03.1998)
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The influence of the chemical composition of silicon nitride films on their thermal oxidation parameters
Chramova, L.V., Smirnova, T.P., Ayupov, B.M., Belyi, V.I.
Published in Thin solid films (24.04.1981)
Published in Thin solid films (24.04.1981)
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Synthesis and properties of ZnS-EuS films grown from volatile complex compounds
Bessergenev, V.G., Ivanova, E.N., Kovalevskaya, Yu.A., Vasilieva, I.G., Varand, V.L., Zemskova, S.M., Larionov, S.V., Kolesov, B.A., Ayupov, B.M., Logvinenko, V.A.
Published in Materials research bulletin (01.10.1997)
Published in Materials research bulletin (01.10.1997)
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High-rate deposition of a -Si:H films using a flow plasma–chemical method with electron beam activation
Sharafutdinov, R. G., Skrynnikov, A. V., Parakhnevich, A. V., Ayupov, B. M., Badalian, A. M., Polyakov, O. V., Baklanov, M. R., Mogilnikov, K. P., Biryukov, S. A.
Published in Journal of applied physics (01.05.1996)
Published in Journal of applied physics (01.05.1996)
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Excited helium-induced CVD of a-Si1−xCx:H films from trimethylchlorosilane
Smirnova, T.P., Yakovkina, L.V., Ayupov, B.M, Dolgpvesova, I.P., Nadolinny, V.A., Kitchay, V.N.
Published in Thin solid films (29.09.1999)
Published in Thin solid films (29.09.1999)
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Optical properties of textured V2O5/Si thin films deposited by reactive magnetron sputtering
Atuchin, V.V., Ayupov, B.M., Kochubey, V.A., Pokrovsky, L.D., Ramana, C.V., Rumiantsev, Yu.M.
Published in Optical materials (01.03.2008)
Published in Optical materials (01.03.2008)
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Optical characteristics of nickel and boron carbonitride films in Si(100)/Ni/BC x N y structures
Ayupov, B. M., Prokhorova, S. A., Kosinova, M. L., Rumyantsev, Yu. M.
Published in Optics and spectroscopy (01.02.2012)
Published in Optics and spectroscopy (01.02.2012)
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Optical characteristics of nickel and boron carbonitride films in Si(100)/Ni/BCxNy structures
Ayupov, B. M., Prokhorova, S. A., Kosinova, M. L., Rumyantsev, Yu. M.
Published in Optics and spectroscopy (01.02.2012)
Published in Optics and spectroscopy (01.02.2012)
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