GaAs-Passivierung mittels stromabwärts erzeugtem Ammoniak-Plasma
GIAPIS, KONSTANTINOS PETROS, GOTTSCHO, RICHARD ALAN, AYDIL, ERAY SACIT
Year of Publication 07.12.2000
Get full text
Year of Publication 07.12.2000
Patent
Downstream ammonia plasma passivation of GaAs
GIAPIS, KONSTANTINOS PETROS, GOTTSCHO, RICHARD ALAN, AYDIL, ERAY SACIT
Year of Publication 19.04.2000
Get full text
Year of Publication 19.04.2000
Patent
Downstream ammonia plasma passivation of GaAs
GIAPIS, KONSTANTINOS PETROS, GOTTSCHO, RICHARD ALAN, AYDIL, ERAY SACIT
Year of Publication 22.12.1993
Get full text
Year of Publication 22.12.1993
Patent
Method for controlling plasma processes
GREGUS, JEFFREY ALAN, JARNYK, MARK ANDREW, GOTTSCHO, RICHARD ALAN, AYDIL, ERAY SACIT
Year of Publication 29.04.1998
Get full text
Year of Publication 29.04.1998
Patent
Method for controlling plasma processes
GREGUS, JEFFREY ALAN, JARNYK, MARK ANDREW, GOTTSCHO, RICHARD ALAN, AYDIL, ERAY SACIT
Year of Publication 27.04.1994
Get full text
Year of Publication 27.04.1994
Patent
Methode zur Steuerung von Plasmaverfahren
GOTTSCHO, RICHARD ALAN, MAPLEWOOD, NEW JERSEY 07040, US, JARNYK, MARK ANDREW, BERKELEY HEIGHTS, NEW JERSEY 07922, US, AYDIL, ERAY SACIT, SUMMIT, NEW JERSEY 07901, US, GREGUS, JEFFREY ALAN, BASKING RIDGE, NEW JERSEY 07920, US
Year of Publication 17.09.1998
Get full text
Year of Publication 17.09.1998
Patent
Method for controlling plasma processes
GOTTSCHO RICHARD ALAN, GREGUS JEFFREY ALAN, AYDIL ERAY SACIT, JARNYK MARK ANDREW
Year of Publication 11.07.1998
Get full text
Year of Publication 11.07.1998
Patent