Semiconductor Fabs & Sustainability
Ayalasomayajula, Neela, Mathew, Rony David
Published in 2024 8th IEEE Electron Devices Technology & Manufacturing Conference (EDTM) (03.03.2024)
Published in 2024 8th IEEE Electron Devices Technology & Manufacturing Conference (EDTM) (03.03.2024)
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Conference Proceeding
CHAMBER CLEAN FOR DRY DEVELOP OF METAL ORGANIC PHOTORESISTS
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Year of Publication 15.08.2024
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Year of Publication 15.08.2024
Patent
CHAMBER CLEAN FOR DRY DEVELOP OF METAL ORGANIC PHOTORESISTS
CHOPRA, NASREEN, CONSTANT, ANDREW, VELLANKI, VENUGOPAL, BALESAN, NIRANJANA, AYALASOMAYAJULA, NEELA, CHAN, KELVIN
Year of Publication 15.08.2024
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Year of Publication 15.08.2024
Patent