Search Results - "AYABE TOKIHIRO" :: K.UTB vyhledávací portál | TBU Library Retrieval Portal

Activation Energy of Nanoscale 3C-SiC Island Growth on Si Substrate

Activation Energy of Nanoscale 3C-SiC Island Growth on Si Substrate

by Yong Sun, Yong Sun, Tokihiro Ayabe, Tokihiro Ayabe, Tatsuro Miyasato, Tatsuro Miyasato
Published in Japanese Journal of Applied Physics (15.10.1999)

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Journal Article

Influence of SiC Cover Layer of Si Substrate on Properties of Cubic SiC Films Prepared by Hydrogen Plasma Sputtering

Influence of SiC Cover Layer of Si Substrate on Properties of Cubic SiC Films Prepared by Hydrogen Plasma Sputtering

by Yong Sun, Yong Sun, Tokihiro Ayabe, Tokihiro Ayabe, Tatsuro Miyasato, Tatsuro Miyasato
Published in Japanese Journal of Applied Physics (01.07.1999)

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Journal Article

VACUUM CHAMBER FOR SEMICONDUCTOR PROCESSOR AND MANUFACTURE THEREOF

VACUUM CHAMBER FOR SEMICONDUCTOR PROCESSOR AND MANUFACTURE THEREOF

by AYABE TOKIHIRO
Year of Publication 08.03.1996

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Patent

DRY ASHING APPARATUS

DRY ASHING APPARATUS

by AYABE TOKIHIRO
Year of Publication 12.07.1986

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Patent

VACUUM SEAL UNIT

VACUUM SEAL UNIT

by HIYOUDOU NAKAMARO, AYABE TOKIHIRO
Year of Publication 20.04.1999

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Patent

PRODUCTION OF CRYSTALLINE SIC THIN FILM

PRODUCTION OF CRYSTALLINE SIC THIN FILM

by MIYASATO TATSURO, YATSUNO KOMEI, AYABE TOKIHIRO
Year of Publication 21.09.1999

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Patent

AIR-TIGHT MOTION TRANSMITTING DEVICE AND MANUFACTURE THEREOF

AIR-TIGHT MOTION TRANSMITTING DEVICE AND MANUFACTURE THEREOF

by YATSUNO KOMEI, AYABE TOKIHIRO, KOJIMA KENICHI
Year of Publication 23.10.1998

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Patent

Plasma processing apparatus

Plasma processing apparatus

by HAGA; KISHICHI, AYABE; TOKIHIRO, SENOO; TAKEHIKO, SOEJIMA; YUKIO, KOJIMA; KENICHI
Year of Publication 02.06.1998

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Patent

PLASMA TREATMENT DEVICE

PLASMA TREATMENT DEVICE

by SOEJIMA YUKIO, SENOO TAKEHIKO, AYABE TOKIHIRO, KOJIMA KENICHI, HAGA KISHICHI
Year of Publication 24.12.1996

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Patent

PLASMA TREATMENT DEVICE

PLASMA TREATMENT DEVICE

by SOEJIMA YUKIO, SENOO TAKEHIKO, AYABE TOKIHIRO, KOJIMA KENICHI, HAGA KISHICHI
Year of Publication 29.11.1996

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Patent

PLASMA PROCESSING EQUIPMENT AND ITS OPERATING METHOD

PLASMA PROCESSING EQUIPMENT AND ITS OPERATING METHOD

by SOEJIMA YUKIO, SENOO TAKEHIKO, AYABE TOKIHIRO, KOJIMA KENICHI, HAGA KISHICHI
Year of Publication 29.11.1996

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Patent

SURFACE TREATING DEVICE

SURFACE TREATING DEVICE

by SOEJIMA YUKIO, SENOO TAKEHIKO, AYABE TOKIHIRO, KOJIMA KENICHI, HAGA KISHICHI
Year of Publication 29.11.1996

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Patent

METHOD AND APPARATUS FOR PLASMA TREATMENT OF SEMICONDUCTOR SUBSTRATE

METHOD AND APPARATUS FOR PLASMA TREATMENT OF SEMICONDUCTOR SUBSTRATE

by AYABE TOKIHIRO, KOJIMA KENICHI, UMETANI MASAAKI, TANADA IZURU
Year of Publication 09.11.1987

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Patent

SUBSTRATE AND WAFER PLASMA PROCESSOR AND ITS CONVEYOR

SUBSTRATE AND WAFER PLASMA PROCESSOR AND ITS CONVEYOR

by MORI ATSUSHI, YAMAMOTO YUKIO, AYABE TOKIHIRO, YOSHIHARA MINORU
Year of Publication 12.06.1987

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Patent