Fin cut and fin trim isolation for advanced integrated circuit structure fabrication
Auth, Christopher P, Ghani, Tahir, Ho, Byron, Hattendorf, Michael L, Ward, Curtis W
Year of Publication 09.05.2023
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Year of Publication 09.05.2023
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Trench isolation for advanced integrated circuit structure fabrication
Meyer, Heidi M, Auth, Christopher P, Ghani, Tahir, Ward, Curtis, Hattendorf, Michael L
Year of Publication 02.05.2023
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Year of Publication 02.05.2023
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FIN PATTERNING FOR ADVANCED INTEGRATED CIRCUIT STRUCTURE FABRICATION
MEYER, Heidi M, AUTH, Christopher P, WARD, Curtis, HATTENDORF, Michael L
Year of Publication 27.04.2023
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Year of Publication 27.04.2023
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HETEROGENEOUS METAL LINE COMPOSITIONS FOR ADVANCED INTEGRATED CIRCUIT STRUCTURE FABRICATION
CHIKARMANE, Vinay, STEIGERWALD, Joseph, AUTH, Christopher P, YEOH, Andrew W, SHIN, Jinhong
Year of Publication 30.03.2023
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Year of Publication 30.03.2023
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CONTINUOUS GATE AND FIN SPACER FOR ADVANCED INTEGRATED CIRCUIT STRUCTURE FABRICATION
TURA, Ahmet, JOSHI, Subhash, MEYER, Heidi M, AUTH, Christopher P, HO, Byron, HATTENDORF, Michael L
Year of Publication 01.02.2024
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Year of Publication 01.02.2024
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Contact over active gate structures for advanced integrated circuit structure fabrication
Veoh, Andrew W, Auth, Christopher P, Madhavan, Atul, Ghani, Tahir, Hattendorf, Michael L
Year of Publication 14.02.2023
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Year of Publication 14.02.2023
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Heterogeneous metal line compositions for advanced integrated circuit structure fabrication
Auth, Christopher P, Chikarmane, Vinay, Shin, Jinhong, Yeoh, Andrew W, Steigerwald, Joseph
Year of Publication 14.02.2023
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Year of Publication 14.02.2023
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DUAL METAL SILICIDE STRUCTURES FOR ADVANCED INTEGRATED CIRCUIT STRUCTURE FABRICATION
AUTH, Christopher P, BHAGWAT, Vinay, LEIB, Jeffrey S, MUKHERJEE, Srijit, HATTENDORF, Michael L
Year of Publication 09.02.2023
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Year of Publication 09.02.2023
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Dual metal silicide structures for advanced integrated circuit structure fabrication
Auth, Christopher P, Bhagwat, Vinay, Mukherjee, Srijit, Hattendorf, Michael L, Leib, Jeffrey S
Year of Publication 22.11.2022
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Year of Publication 22.11.2022
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Replacement gate structures for advanced integrated circuit structure fabrication
Auth, Christopher P, Ho, Byron, Jaloviar, Steven, Hattendorf, Michael L, Leib, Jeffrey S
Year of Publication 25.10.2022
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Year of Publication 25.10.2022
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PLUGS FOR INTERCONNECT LINES FOR ADVANCED INTEGRATED CIRCUIT STRUCTURE FABRICATION
AUTH, Christopher P, YEOH, Andrew W, JIN, Ilsup, KANDAS, Angelo, HATTENDORF, Michael L
Year of Publication 20.10.2022
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Year of Publication 20.10.2022
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Continuous gate and fin spacer for advanced integrated circuit structure fabrication
Meyer, Heidi M, Auth, Christopher P, Ho, Byron, Tura, Ahmet, Joshi, Subhash, Hattendorf, Michael L
Year of Publication 04.10.2022
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Year of Publication 04.10.2022
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Plugs for interconnect lines for advanced integrated circuit structure fabrication
Auth, Christopher P, Kandas, Angelo, Jin, Ilsup, Yeoh, Andrew W, Hattendorf, Michael L
Year of Publication 02.08.2022
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Year of Publication 02.08.2022
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