Integration for reduction of sub-half-micron center yield fallout
Wing Kei Au, Sappidi, J., Parks, D., Delgado, M., Kulkami, M., Costabile, M., Li, J., Gabriel, C.T., Wong, V., Levan, M.
Published in 10th Annual IEEE/SEMI. Advanced Semiconductor Manufacturing Conference and Workshop. ASMC 99 Proceedings (Cat. No.99CH36295) (1999)
Published in 10th Annual IEEE/SEMI. Advanced Semiconductor Manufacturing Conference and Workshop. ASMC 99 Proceedings (Cat. No.99CH36295) (1999)
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