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Year of Publication 29.11.2023
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Year of Publication 04.07.2018
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ROTATING BIASABLE PEDESTAL AND ELECTROSTATIC CHUCK IN SEMICONDUCTOR PROCESS CHAMBER
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Year of Publication 06.10.2022
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CHAMBER AND METHODS OF COOLING A SUBSTRATE AFTER BAKING
LIANG, Qiwei, YIEH, Ellie Y, ATHANI, Shekhar, TSO, Alan L, LUBOMIRSKY, Dmitry, KIM, Hyunjun, BUCHBERGER, JR
Year of Publication 01.06.2023
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Year of Publication 01.06.2023
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CHAMBER AND METHODS OF COOLING A SUBSTRATE AFTER BAKING
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Year of Publication 25.05.2023
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Year of Publication 25.05.2023
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Rotating biasable pedestal and electrostatic chuck in semiconductor process chamber
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Year of Publication 16.12.2022
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Year of Publication 16.12.2022
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Chamber and methods of cooling a substrate after baking
LUBOMIRSKY, DMITRY, TSO, ALAN L, BUCHBERGER JR., DOUGLAS A, LIANG, QIWEI, YIEH, ELLIE Y, KIM, HYUN-JUN, ATHANI, SHEKHAR
Year of Publication 16.06.2023
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Year of Publication 16.06.2023
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