Lorentzian-like image blur of gold nanoparticles on thick amorphous silicon films in ultra-high-voltage transmission electron microscopy
Oshima, Yoshifumi, Nishi, Ryuji, Asayama, Kyoichiro, Arakawa, Kazuto, Yoshida, Kiyokazu, Sakata, Takao, Taguchi, Eiji, Yasuda, Hidehiro
Published in Microscopy (01.10.2013)
Published in Microscopy (01.10.2013)
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Journal Article
Analysis of Junction Leakage Current Failure of Nickel Silicide Abnormal Growth Using Advanced Transmission Electron Microscopy
Kudo, Shuichi, Hirose, Yukinori, Yamaguchi, Tadashi, Kashihara, Keiichiro, Maekawa, Kazuyoshi, Asai, Koyu, Murata, Naofumi, Katayama, Toshiharu, Asayama, Kyoichiro, Hattori, Nobuyoshi, Koyama, Toru, Nakamae, Koji
Published in IEEE transactions on semiconductor manufacturing (01.02.2014)
Published in IEEE transactions on semiconductor manufacturing (01.02.2014)
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Journal Article
A Dopant Cluster in a Highly Antimony Doped Silicon Crystal
Kim, Suhyun, Oshima, Yoshifumi, Sawada, Hidetaka, Hashikawa, Naoto, Asayama, Kyoichiro, Kaneyama, Tosikatu, Kondo, Yukihito, Tanishiro, Yasumasa, Takayanagi, Kunio
Published in Applied physics express (01.08.2010)
Published in Applied physics express (01.08.2010)
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Journal Article
Boron Observation in p-Type Silicon Device by Spherical Aberration Corrected Scanning Transmission Electron Microscope
Asayama, Kyoichiro, Hashikawa, Naoto, Kajiwara, Kazuto, Yaguchi, Toshie, Konno, Mitsuru, Mori, Hirotaro
Published in Applied physics express (01.07.2008)
Published in Applied physics express (01.07.2008)
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Journal Article
Maximum Permissible EB Acceleration Voltage for SEM-Based Inspection Before Electrical Characterization of Advanced MOS
Mizuno, T., Takahashi, M., Azuma, Y., Yanagita, H., Asayama, K., Nakamae, K.
Published in 2007 IEEE International Reliability Physics Symposium Proceedings. 45th Annual (01.04.2007)
Published in 2007 IEEE International Reliability Physics Symposium Proceedings. 45th Annual (01.04.2007)
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Conference Proceeding
Strain Analysis of FinFET Device Utilizing Moiré Fringes in Scanning Transmission Electron Microscopy
Kondo, Yukihito, Endo, Noriaki, Fukunaga, Kei-ichi, Aoyama, Yoshitaka, Asayama, Kyoichiro, Lin, Ching Chun, Kim, Hsu
Published in Microscopy and microanalysis (01.08.2018)
Published in Microscopy and microanalysis (01.08.2018)
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Journal Article
Measurement of Local Dielectric Function of LSIs Using TEM-EELS
Anan, Yoshihiro, Koguchi, Masanari, Asayama, Kyoichiro, Kimoto, Koji, Matsui, Yoshio
Published in KENBIKYO (30.09.2009)
Published in KENBIKYO (30.09.2009)
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Journal Article
Polymorphs Discrimination of Nickel Silicides in Device Structure by Improved Analyses of Low Loss Electron Energy Loss Spectrum
Asayama, Kyoichiro, Hashikawa, Naoto, Yamaguchi, Tadashi, Terada, Shohei, Mori, Hirotaro
Published in Japanese Journal of Applied Physics (01.06.2007)
Published in Japanese Journal of Applied Physics (01.06.2007)
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Journal Article
Three-Dimensional Visualization Technique for Crystal Defects in High Performance p-Channel Metal--Oxide--Semiconductor Field-Effect Transistors with Embedded SiGe Source/Drain
Kudo, Shuichi, Nakanishi, Nobuto, Hirose, Yukinori, Sato, Kazuhiko, Yamashita, Tomohiro, Oda, Hidekazu, Kashihara, Keiichiro, Murata, Naofumi, Katayama, Toshiharu, Asayama, Kyoichiro, Komori, Junko, Murakami, Eiichi
Published in Japanese Journal of Applied Physics (01.04.2010)
Published in Japanese Journal of Applied Physics (01.04.2010)
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Journal Article
Material Microcharacterization of Sol–Gel Derived HfO 2 Thin Films on Silicon Wafers
Shimizu, Hirofumi, Asayama, Kyoichiro, Kawai, Naoyuki, Nishide, Toshikazu
Published in Japanese Journal of Applied Physics (01.10.2004)
Published in Japanese Journal of Applied Physics (01.10.2004)
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Journal Article